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13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

(P.12) ) 84 - 21. 1byte 2byte 4byte 2byte 4byte (1)2byte 2byte Output Byte6,Byte7 100mm/s IO Output 12byte 100mm/s 16 0064h 00 64 h (2)4byte 64h 00h Byte6 Byte7 Bit7 Bit0 4byte Output Byte8Byte11 700.00mm IO Output 12byte 0.01mm 700.00mm 10 7016 00011170h 00 01 11 70 h (3) 11h 70h Byte8 Byte9 (6) 01h 00h Byte10 Byte11 ALM Bit7 Bit0 4byte Output Byte8Byte11 -700.00mm IO

COMBINATION UNITS MODULAR TYPE (N)AC1000(N)AC6000 M51" C o m b i n a t i o n o f f i l t e r, re g u l a t o r a n d l u b r i c a t o r i n c l u d i n g mounting bracket and pressure gauge H O W T O O R D E R FILTER/REGULATOR/LUBRICATOR (N)AC 00 G T E C H N I C A L SPECIFICATIONS D R A I N Manual drain D Auto drain Japanese N North American Model NAC1000 NAC2000 NAC3000 NAC4000 NAC5000

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

Binary digit (decimal value) 0 to 50 ASCII hex "00" to "32" (d) Target position (encoder count value): This item is valid in Pulse Input Type control signal mode only. The target position data is sent as an encoder count value. Count value 1,000,000 has been fixed for 0 mm as a reference point.

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug

-25(L)-X105 ZSE4-00-26(L)-X105 Model (N)ZL112 (N)ZL112-G (N)ZL112-E (N)ZL212 Nozzle Diameter 1.2mm 1~5V + -5% FS load impedence 1k 1.2mm x 2 Output Specification 1 output, NPN open collector 30V 80mA Max Suction Flow 100 l/m (ANR) 200 l/m (ANR) 126 l/m (ANR) Air Consumption 63 l/m (ANR) Fluid Air Max Vacuum Pressure -84kPa (-12PSI) -12PSI Setting PressureRange 0~-101kPa, -760mmHg, -14.7PSI

-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (5/16") One-touch fitting With 12 (3/8") One-touch fitting C10 (N11) Bottom ported Rc 1/4 Single wiring Special

1.v.') l|xT33-17 Millim.lG in Paqfi656 NVS 421,1-00 "XX" D 2 3 SlE a35 y. condiBie ol s9.ol l3l.vo (h.tchd 0t) ! (6) O rings 5 axl$3n0 Sdmd.$ y.6i.tsil.i.d r15/1mV6OH2 aoP'lov60 H: So|mdceps!

Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single acting

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 611 3 Port Pilot Solenoid Valve 10-SYJ300 Type 20 Manifold: Top Ported/10-SS3YJ3-20Stations -00

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 6mm 2 (0.33), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), VALVE MECHL, VALVE,