Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 24VDC, Lead Wire: DIN EN175301-803 Terminal w/Connector, Light/Surge Suppressor: With light/surge voltage suppressor, Manual Override: Non-locking Push Type, Port Size: 3/8, Thread: NPT, Made to Order: -, CE Approval: -

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Lead Wire: Y (DIN EN175301-803 Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, Port Size: 03 (3/8), Thread: N (NPT)

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot

Model: VP700, Body: Body Ported, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Model: VP500, Body: Body Ported, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: Applicable Tube O.D. ø1/4"

Model: VP500, Body: Base Mounted, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: Applicable Tube O.D. ø1/4"

Model: VP500, Body: Body Ported, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: Applicable Tube O.D. ø1/4"

Model: VP500, Body: Base Mounted, Pilot: Internal Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Model: VP500, Body: Base Mounted, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Model: 7 (VP700), Body: 42 (Body Ported), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 5 (VP500), Body: 42 (Body Ported), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: S1 (M12 Connector, Rockwell Automation), Check Valve, External Pilot Only: B (Applicable Tube O.D. ø1/4")

Model: 5 (VP500), Body: 44 (Base Mounted), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: B (Applicable Tube O.D. ø1/4")

Model: 5 (VP500), Body: 42 (Body Ported), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: B (Applicable Tube O.D. ø1/4")

Model: 5 (VP500), Body: 44 (Base Mounted), Pilot: Internal Pilot, Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 5 (VP500), Body: 42 (Body Ported), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 5 (VP500), Body: 44 (Base Mounted), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 5 (VP500), Body: 44 (Base Mounted), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Bracket: None, Switch Electrical Entry: S1 (M12 Connector, Rockwell Automation), Check Valve, External Pilot Only: B (Applicable Tube O.D. ø1/4")