Model: VP700, Body: Base Mounted, Pilot: Internal Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 1/2, VP700, Thread: G, Bracket: M, Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: None

Model: VP700, Body: Base Mounted, Pilot: Internal Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 1/2, VP700, Thread: NPT, Bracket: None, Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: None

Series: 744 (VP700), Pilot Type: Internal Pilot, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Light & Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: 04 (1/2), Thread Type: Rc, Actuation: A (N.C., Normally Closed)

Series: 744 (VP700), Pilot Type: Internal Pilot, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Light & Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: 04 (1/2), Thread Type: N (NPT), Actuation Type: A (N.C., Normally Closed), Made to Order: X500

Series: 744 (VP700), Pilot Type: Internal Pilot, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Light & Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: w/o Sub-plate, Thread Type: Rc, Actuation Type: A (N.C., Normally Closed), Made to Order: X500

Model: 7 (VP700), Body: 44 (Base Mounted), Pilot: Internal Pilot, Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 04 (1/2, VP700), Thread: F (G), Bracket: M, Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: None

Model: 7 (VP700), Body: 44 (Base Mounted), Pilot: Internal Pilot, Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 04 (1/2, VP700), Thread: N (NPT), Bracket: None, Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: None

Model: 7 (VP700), Pilot: Internal Pilot, Electrical Entry: D (DIN Terminal), Port Size: 04 (1/2"), Thread: F (G), Switch Electrical Entry: G 1/2, OMRON, Check Valve: None, Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)

Model: 7 (VP700), Pilot: Internal Pilot, Electrical Entry: D (DIN Terminal), Port Size: 04 (1/2"), Thread: N (NPT), Switch Electrical Entry: G 1/2, OMRON, Check Valve: None, Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)

Series: VP700, Pilot Type: Internal Pilot, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 24VDC, Electrical Entry: DIN Terminal w/Connector, Light & Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Type, Port Size: 1/2, Thread Type: Rc, Actuation: N.C., Normally Closed

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

ZX

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

Electric Actuator/Slider Type

U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 12 Series LEY Dimensions: In-line Motor Encoder Z-phase detecting position F1 Note 1) Rod operating range (Stroke + G mm) Z D T EV M J U 4 x O1 thread depth R M K Note 2) V W

Environment

1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.

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