Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2)

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2)

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

CE

B H NTJ-015A NT-02 NT-04 NT-05 M5 x 0.8 7.8 9.2 12 8 4 H B M8 x 1.25 12.5 15.0 20 13 5 M14 x 1.5 21.0 25.4 32, 40 22 8 M18 x 1.5 26 31.2 50, 63 27 11 Electrical Wiring Input/Output The input/output of the scale cylinder is performed by a 7 shielded twisted pair wire from the sensor section plus a connector.

Electric Actuators

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

VZ100/300/500

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.

Table of Contents

Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600 Stroke (mm) AS5000-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Compact Cylinder with Air Cushion Series RQ

L d m t D d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft 21 25.6 41.6 50.6 7.6 9.6 9.6 13.4 16.2 20.2 36.2 44.2 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 20 25 32, 40 50 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 5 6 8 11 13 17 22 27 15.0 19.6 25.4 31.2 IY-G02 IY-G03 IY-G04 IY-G05 NT-02 NT-03 NT-04 NT-05 8 10 10 14 0.040 0.076 0.040 0.076 0.040 0.076 0.050

IDX-OM-W011

517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-2 GWP 6 2 IDX-OM-W011 6 6-3 IDF1E / IDF2E /IDF3E ( 10 IDF3E-20 [AC100V] :0.8m) (:1.9m) [ AC200V ] [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF2E Rc3/8 51