Seal Type: Rubber, Configuration: 3-Position, Exhaust Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -
1 (mm) Auto switch model Bore size 6 10 16 Auto switch mounting Auto switch model Bore size (mm) 6 10 16 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2 2.5 3 D-M9l D-M9lV D-M9lW D-M9lWV D-A9l D-A9lV Band mounting D-A9l 4.5 6 7 D-H7l/H7lW D-H7BA/H7NF 3 4 4 BJ6-006 (A set of a, b, d, f) BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-H7C 5 8 9 D-C7l/C80/C73C/C80C 6 7 7 D-M9lA Note 2) D-M9lAV
1 y u i D-M9m !6 Component Parts No. Description Material No.
Padlock mounting position D SUP. C A 1(P) 2(A) Air Supply Warning B 1 Mount air filter to supply side close to valve. Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18
IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.
Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)
Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)
Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)
Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 2Z (200VAC/50Hz, 230VAC/60Hz), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)
Seal Type: S (Metal), Configuration: YZ (2-position, Dual Pressure), Number of Solenoids: S (Single), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)
Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)
4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.
V V V V + b Float type auto drain c Bowl *6 Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V 8 Metal bowl with level gauge V V V V + d Drain port *7 Nil With drain cock V V V V Semi-standard J*8 Drain guide 1/8 V Drain guide 1/4 V V V V W*9 Drain cock with barb fitting (for 6 x 4 nylon tube) V V V V + Nt e Flow direction Nil Flow direction: Left to right
/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 7 6.5 6 7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.
/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 7 6.5 6 7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.
14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-AM B M12 (5 )4 2 2 M12 (4 ) No. 1 LED 2 () 3 () 4 5 6 () -33No.EX-OMN0037CN-A 1 24 V() 24 V() 2 + 3 0 V() 0 V() 4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC 2 2 A/D DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1 k 600 IP67 -34No.EX-OMN0037CN-A 0V 2 EX600
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 3/4, Option: External Pilot Supply