Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 40 32 25 20 40 32 20 CX 0 0 D0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to

CLQ

9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99 116 134 43 10 43.5 77 117.5 53.5 75, 100 126 53 10 to 50 Rod end nut L1 100 63 136 11 11 117 136 154 50 12 43.5 94 136 63 75, 100 Double Clevis Style Double clevis style: CLQD/CDLQD Stroke range Without auto switch With auto switch Bore size (mm) CT 4-N Cap bolt CD CT A CL A B CL B 126 36 112 10 to

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 584 a Programless Controller (With Stroke Study) LECP2 Series Dimensions Screw mounting (LECm2mm-m) 38 36.2 18.1 85 4.5 for body mounting 1.2 4.5 110 101 86 4.5 for body mounting DIN rail mounting (LECm2mmD-m) CN4 I/O connector 38 36.2 85 (11.5) SL CN3 encoder connector CN2

JA/JAH/JB/JS

(kg) A B C D E F G H Nominal size Pitch Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

Floating Joint

R Weight (kg) B C D E F G H 40 50 63 80 100 100 JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 28 32 32 41 46 55 70 52.5 64 74 94.5 112 118 11000 18000 28000 54000 71000 71000 0.58 1.08 1.5 2.7 4.8 5.4 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

Compact Guide Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G

Suction Guard (Produced upon receipt of order) FHG Series

101 71 71 71 104 104 104 129 129 53 53 53 74 74 74 94 94 9 9 9 9 9 9 9 9 3.6 3.6 3.6 7.3 7.3 7.1 14.5 14.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

Refrigerated Air Dryer

AMH AME AMF ZFC SF SFD LLB AD GD 101

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

mounting) Connector case Release lever (Both sides) L2 5 (Rail mounting hole pitch: 12.5) L1 (Station n) (Station 1) Light/surge voltage suppressor With option 4 A 4 A 4 A 4 A 37.5 59.5 3/5 E 3/5 E 45.5 2 B 2 B 2 B 2 B 74.5 P 1 P 1 P 1 E 3 P 1 E 3 10 Individual EXH spacer (For DIN rail mounting) (7.5) Individual SUP spacer L Dimension n: Stations L n 2 123 112.5 90.5 19.5 63 3 135.5 125 101

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note 3) Reference dimensions AS421F-04-12 12 20.9 22 49.5 35.2 101 Note 1) ( ) are the dimensions of NPT thread. Note 2) Reference thread dimensions after installation.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.

Intrinsically Safe Valve

Do not install in Zone 0 (as defined in IEC 60079-101:2008) or Zone 20 (as defined in IEC 60079-10-2:2009) Zone 0 area classification: An area in which an explosive gas atmosphere is present continuously or for long periods or frequently.

Series AP3500

Vespel is a registered trademark of DuPont. 101 Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP4500 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP4540) Indicator switch available as an option (AP4550) How to Order (Inlet) (Outlet) AP

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

EXxx-OMY0006CN

IoT 111 No.EX##-OMY0006CN Revision history 2021 1 22 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved No.EX##-OMY0006CN

PS-OMH0005CN

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

4-channel Flow Monitor ( compatible)

[March 2023] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved No.PF-OMA1011-A

HRX-OM-W038

Product Warranty HRS Series 10-2 Revision Rev.E : Dec. 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved