Part Number Description: VALVE SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY HIGH TEMP   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY HIGH TEMP   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Smooth Vent Valve (Supply Line) XVD Series

Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523

VALVE SEAL 2, XLA, R3 MATERIAL, HIGH VACUUM VALVE, L45, 6 lb

Part Number Description: O-RING (XLA-160)   Product Line: V   Product Line Description: VALVE   Family Code: 399   Family Description: OTHER MISCELLANEOUS SERIES   Class Code: 21   Part Code: 2   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: VALVE SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   Click here to report information errorImage shown may not match exact part number

Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 150°C, No Heater, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Oxalic Acid Anodized, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: 2-

Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 150°C, No Heater, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Oxalic Acid Anodized, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: 2-

40, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 150°C, No Heater, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: 2-

® (4079)], Seal Replacement: A (2-3-4)

® (4079)], Seal Replacement: E (2-4)

], Seal Replacement: A (2-3-4)