VN-OMT0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Fluoropolymer Piping Equipment

LQ1T51-R4 19 6 19 7 29 15 29 14 28 26 14 26 54 38.5 54 39 16.5 39 3.6 LQ1T51-R5 12 19 19 29 26 54 39 9.4 LQ1T51-R6 10 19 19 20 17 44 23 7.4 LQ1T51-R7 12 12 19 24 24 39.5 21 21 36 42 52.5 57.5 28 28 49 9.4 LQ1T51-R8 10 10 19 7.4 LQ1T51-R10 10 19 10 7 20 29 24 14 28 17 26 21 44 54 49 23 39 28 7.4 LQ1T51-R12 8 19 19 20 29 29 17 26 26 54 39 5.5 LQ1T51-R13 6 19 19 3.6 LQ1T51-R17 10 12 19

A

40 32 54 47 35 28 M Slide Bearing L Ballbush Bearing 66 59 54 49 20 MGPM 49 43 38 35 87 75 PT N NPT 62 54 48 43 20 MGPL 58 48 101 90 70 58 88 79 71 65 25 MGPM 69 60 54 49 116 100 B O R E S I Z E 80 70 62 55 25 MGPL 82 68 132 118 93 77 12 12mm 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm 80 80mm 100 100mm 142 127 116 106 32 MGPM 203 164 182 159 S T R O K E ( M M) 130 114 101 90

0.4

Flow rate characteristics: C Max. operating frequency SZ 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VF VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

Title not found

L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

VN-OMP0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Table of Contents

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Table of Contents

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Made to Order

48.5 46 39 43 43.5 41 46 40.5 38 46.5 42 42 45.5 58.5 56 61 55.5 53 44.5 48 51.5 49 54 48.5 46 53.5 49 49 52.5 58.5 56 61 55.5 53 51.5 55 51.5 49 54 48.5 46 62.5 58 58 61.5 68.5 66 71 65.5 63 60.5 64 61.5 59 64 58.5 56 73 68.5 69 72 68.5 66 71 65.5 63 71 74.5 61.5 59 64 58.5 56 Note 1) Adjust the auto switch after confirming the operating conditions in the actual setting.

V100

Base mounted (with sub-plate) 53 (32) 58 (37) M5 x 0.8 54 (33) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate.

MGP

40 32 54 47 35 28 23 20 17 15 MGPL CL 42 49 36 32 43 38 29 35 87 75 66 59 54 49 MGPM 20 35 58 30 26 48 101 23 90 70 58 62 54 48 43 MGPL MLGC 55 69 48 43 60 54 38 49 116 100 88 79 71 MGPM 65 25 45 82 38 33 68 132 29 118 93 77 80 70 62 MGPL 55 CNA F 91 203 80 71 64 164 182 159 142 127 MGPM 116 106 32 137 191 121 108 98 157 164 144 203 MGPL 186 171 158 CB MGPM 91 203 80 71 64 164 182 159 142

1

(54) 63.5 (63.5) 75 (75) 20.5 (31.5) 22 (34) 24 (36) 27.5 (37.5) 30 (40) 36.5 (46.5) 38.5 (48.5) 44 (54) 53.5 (63.5) 65 (75) 33 (33) 39.5 (39.5) 40.5 (40.5) 46 (46) 53.5 (53.5) 63 (63) 45.5 55 55.5 57 66 75.5 62.5 72 73.5 75 86 97.5 6 to 29 Data 101 to 299 6 to 49 6 to 99 Dimensions of with auto switch and those of without auto switch are the same. 11 to 99 ( ): Denotes the dimensions

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

12.5 37.5 50 88 54 4 17 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 25 37.5 50 88 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51 75 112 225 64 12.5 25 37.5 50 100 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51 75 112 225 64 12.5 25 37.5 50 100 86 30 103 250 225 200 175 341 150 191 316

Air Slide Table

Stroke: 10, 20 mm Extension stroke end adjuster (Shock absorber) (M14 x 1.5) Retraction stroke end adjuster (Shock absorber) (M14 x 1.5) MXQ25-mZA-X2200(L): Metal stopper with bumper Width across flats 19 Adjustment range 19 54 11 11 54 Adjustment range L1 Width across hexagon socket hole 6 Width across flats 19 Extension stroke end adjuster Width across hexagon socket hole 6 (M14 x 1.5)

Cylinder with Lock

R1 S5 XD Z 32 E5032 32 10 11 47 26 0.2 0.6 21 18 31 8 38 51 7 10 10 6.6 200 222 40 E5040 36 12 11 54 28 0.2 0.6 24 22 35 10 41 54 9 10 11 6.6 226 250 50 E5050 45 12 15 66 32 0.2 0.6 33 30 45 12 50 65 11 12 12 9 245 277 63 E5063 50 16 15 77 40 0.2 0.6 37 35 50 12 52 67 11 14 15 9 269.5 301.5 80 E5080 63 16 18 99 50 0.2 0.6 47 40 60 14 66 86 12.5 18 15 11 320 360 100 E5100 71 20 18 118 60 0.2

MY1

Stroke adjusting section detail Upper plate assembly Hexagon socket head cap screw BMAX AMAX Table 1 (mm) 50 63 Bore size (mm) 6 to 26 14 to 54 87 60 A to A MAX. B to B MAX. C 6 to 31 14 to 74 102 85 Max. adjustment range Side cover Hexagon socket head button screw Figure 2. Cover installation and removal Figure 3.

MGP

A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.