Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber

HRX-OM-Q026

8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity . 8-18 8.5.1 HRSH100-A-20/40-, HRSH100-W-20

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

REC

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC (mm) 32 H1 I K MM A AL B1 B2 D F G H E Bore (mm) Stroke range MK(2) 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 5 33.5 5 18 15.5 13 26 8 13 10 41 Up to 700 20 25 M10 x 1.25 6 37.5 5.5 22 19.5 17 32 10 13 10 45 Up to 700 26 RS Q G 32 M10 x 1.25 6 46.5 5.5 22 19.5 17 32 12 13 11 45 Up to 1000

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Rotary Actuator/Vane Type

Q1 = M Applicable shaft type: W Applicable shaft type: W Q2 = M L1 = Y = X = L2 = [mm] Size CRB2, CRBU2 Y L2 max Q2 10 7 to 8 Y-3 M4 15 8.5 to 9 Y-3.5 M5 20 10 Y-4 M6 30 13 Y-5 M8 40 15 Y-6 M10 [mm] Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 9 to 14 X-5 M4 7 to 14 X-3 M4 15 11 to 18 X-6 M5 8.5 to 18 X-3.5 M5 20 13 to 20 X-7 M6 10 to 20 X-4 M6 30 16 to 22 X-8 M8 13 to 22 X-5 M8 Symbol: A5

REC

D F G H E Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 M8 X 1.25 20 5 8 33.5 5 18 15.5 13 8 13 10 41 150 to 700 20 M10 X 1.25 25 6 8 37.5 5.5 22 19.5 17 10 13 10 45 150 to 700 26 M10 X 1.25 32 6 8 46.5 5.5 22 19.5 17 12 13 11 45 150 to 1000 26 M14 X 1.5 40 8 10 56.2 7 24 21 22 14 16 12.5 50 200 to1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range 1 8 30 20

C95

E B1 B2 B3 TG1 T I1 (min) I2 FL H d1 d2 d3 CN SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Magnet lever Note) Note) These items (no. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 140 and 141 for detailed specifications.

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

Compact Cylinder with Air Cushion

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) 11 60 120 22 6.5 12 YB-05 50, 63 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-03 32, 40 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-05 50, 63 14 75 230 28 8.5 16 YB-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YU-08 80 18 90 455 36 10.5 18 YB-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 YU-10 100 12 Series RQ Auto Switches/Proper Mounting Positions and Height

HRX-OM-S004

Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No. Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection C2 thread N S U F GN GS B3 M3 x 0.5 3 11 6 6 10 15 25 ZP T 10 13 16 UT Vacuum inlet: One-touch fitting J K A8 Applicable tubing O.D. J B5 M5 x 0.8 5 13 8 Width across flats H Dimensions Per Vacuum Inlet: One-touch Fitting G Model G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

VQ7-6/7-8

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

reduces flow setting time

AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge