Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

MHF2

dimension table Unit: mm A B Model A C D B 25 MHF2-8DR 11 M3 x 0.5 37 5.5 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 14.8 M5 x 0.8 54 7 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 19 M5 x 0.8 76 9 MHF2-16D1R (Finger closing port) (Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 9 through 20. 94 M5 x 0.8 23 10 MHF2

MY2

head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CYPSeries

+ B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

CYPSeries

+ B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

CYP

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

Slide Tables MX Series

side mounting Work piece mounting L L Use a mounting bolt that is 0.5mm shorter, when attached, than the L dimension.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Stroke Reading Cylinder and Counter

phase J B C D A t A COM COM COM B 12 VDC GND F.G.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations 583 Series AS1F-D Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 type M5 type U10/32 type Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 584 Series AS1F-D Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Sine Cylinder Series REC

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

Sine Cylinder Series REC

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override