High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) R A B A A 29 28 27 26 25 24 23 22 21 20 No. 460.5 448 435.5 423 410.5 398 385.5 373 360.5 348 L dimension R P R P P 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 62.6 Weight (g) B SY7000 DIN rail dimensions and weight VZ1000-11-4SY3000 SY5000/7000 Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

3 Port Solenoid Valve Metal Seal Series VZ200 1

(M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n +

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

I

Proof 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output P I P I N G S P E C I F I C AT I O N S 01 Direct Piping 1/8 PT T1 NPTF 1/8 H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 ISE4 B D W I R I N G S P E C I F I C AT I O N S O P E R AT I N G P R E S S U R E L Grommet Entry 3m Lead 0.6m -0.1 ~ 1MPa L -10 ~ 100KPa DIN R A I L M O U N T I N

125

Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula

Flow Control Equipment

(mm) 3.2, 4 8, 10 6 4 3.2, 4, 6 12 38 7 Air flow (l/min(ANR)) Controlled flow JIS Symbol Effective area (mm2) 0.2 0.6 0.1 230 180 460 260 390 100 Air flow (l/min(ANR)) Free flow Effective area (mm2) 3.5 2.7 7 4 6 1.5 Note) Supply pressure: 0.5MPa Temperature: 20 OC How to Oder Indication of air flow direction on body AS 2 2 1 1 F M M5 06 S Meter-out Meter-in Body size 1 2 M5 1/8, 1/4 Options

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold. S41 Type How to Order Applicable solenoid valve (1) SS3Y1 S41 05 M3 VQ SY114-l SY114A-l SY124-l SY124A-l Stations A port size M3 M5 M3 X 0.5 M5 X 0.8 VQZ 2 stations 02 ... ...

MRHQ

three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34 Side A Side B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Indicator light With Special function Applicable load Electrical entry Wiring (Output) Type 0.5 () 3 (L) Perpendicular In-line DC AC 3-wire (NPN) Solid state switch F9NV F9N P P 5V 12V IC _ _ Relay, PLC Grommet 3-wire (NPN) 24V F9PV F9P P P 2-wire 12V F9BV F9B P P Lead wire length: 0.5m.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

M5 thread 1 (P) N.C.

Series KG Stainless Steel One-touch Fittings

P. 128 Male connector: KGH Part No. H (Hex.) L M Effective orifice(mm 2) Nylon Urethane Connection thread R(PT) M5 Applicable tube O.D.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 female thread (A) IDG30M/50M IDG30HM/50HM IDG30LM/50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female thread HA AT With float type auto-drain With drain guide Drain Discharge ID AMG (P) (N) AFF N.C.: Gray N.O.: Black Thread size: 1/4 (Without valve mechanism) Applicable tubing O.D

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04