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Note No. q w e r t y u i o !0 !1 !2 !3 !

The expect ed perf orm ance and saf et y assurance of t he equi pm ent w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned i t s com pat i bi l i t y w i t h t he product .

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

D o n o t m e r g e p u r s i n s a i r t i n e p i p i n s o n F t u c t d e w o o i n t c h e c k e r a \ v a t e r f l o w i n t o m e m b r a n e a i r d r Y e r . a l G r a i n s i n d e w p o i n t c h e c k e r a r e c r u s h e d . I : W h e nd e w p o i n t c h e c k e r i s a i t a c h e d S t a n d a r d e w p o i n !

G G4 [ ] 4 18AWG G/Y 18AWG G/Y 4 Inverter IV L2/N W W 2 2 [ ] 3 18AWG BK 18AWG BK BK 3 W V M V [ ] 2 18AWG BK WH 8 8 2 V G 3 L1/L U U 1 1 [ ] 1 18AWG BK 18AWG BK RD 9 9 1 U PM PUMP 5 5 (CN3) 7 7 6 6 4 4 3 3 PM PUMP 2 2 PM PUMP 1 1 16AWG G/Y G4 [ ] 2/2 G V (CN1) PM 16AWG G/Y G4 [ ] G U Standard BL BL DC Power Supply Condenser DCPS [ ] 18AWG G/Y G2 5 5 C3 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1

6 MF5 w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

Specification With power-saving circuit (Continuous duty type): 0.1 W (JSY3000/5000) External pilot JSY 3 1 0 0 Z 5 JSY3000/5000 Series q w e r t y Base mounted q Series w Type of actuation y Manual override 1 JSY1000 3 JSY3000 5 JSY5000 1 2-position Single 2 Double 3 3-position Closed center 4 Exhaust center 5 Pressure center A 4-position dual 3-port D: Push-turn locking slotted type Nil

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 416 b XLA/XLA V Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

DO Without connector With connector Y DIN terminal (Type Y) YO Without connector Note) Do not replace V111 (G, H, L, M, W) with V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

C 4-O D Q 2-P T B U W S E K L AA I J R A X AP Y + Stroke AB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V Z + Stroke Non-lock type Lock type 8-AF AC AD AE Rod end lock Q Y + Stroke R Head end lock Dimensions not marked with an are the same as standard.

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Note 3) The flow rate unit is based on 0C and 101.3kPa. 87 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Series PFA Sensor Unit Construction PFA710/750 PFA510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PFA711/721/751 PFA511/521/551 q w e r t y Parts list No. 1 2 3 4 5

T O P R E S E T P R E S S U R E S W I T C H: K e e p p re s s i n g t h e p u s h b u t t o n ( 1 ) S E T a n d tur n the pressure set trimmer (3) P.SET and f i g u r e s a r e s h o w n o n t h e p r e s s u r e d i s p l a y board (4) LCD.