Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Table of Contents

0 w !2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

•

P R across flats 1 2 , oj Iir w w \ M8X 1.25 I . j 0 >-j / ~ P 3.5 I 'A ~.8 Flat type Flat with rib (mm) Flat type . Flat w~h rib (mm) Model . .A .8 C JD ' Model 'A .8 C D E F I:M6x1 I:Ma XI y I I: Ma x l Y E F I r.M6 Xl G c H G H ..JatlFlat1>ilt1 rib I . .

VFS

0, Terminal i, Metal joint q, w, Gasket e, r, O-ring y, u, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket e, r, O-ring y, u End plate (U) !1, Metal joint q, w, O-ring t, y End plate (U) !1, Metal joint q, w, O-ring t, y End plate (D) !2, Metal joint q, w, Gasket e End plate (D) !2, Metal joint q, w, Gasket e 02 03 VVFS3000-1A-1Plug-in type Manifold block assembly !

5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

ZP3

(Trivalent chromated) M6 x 0.75 M12 x 1 Steel (Zinc chromated) M10 x 1 5 Fitting 6 Cassette Vacuum inlet direction Lateral Y Type/ZP3-Y ZP3-Y-B-B ZP3-Y-B-(02/04/06) w e Vacuum inlet Vacuum inlet q Component Parts ZP3-Y-B-(U2/U4/U6) No.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Table of Contents

1 Drain q r e w t i u y o !0 !

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

MY1

Wall mounting P. 58 z y x y x z W: Work piece (2kg) 3. Ceiling mounting P. 42 4. Vertical mounting P. 80 x z y x y z MY1B32-500 Refer to the pages above for actual examples of calculation for each orientation. 2 Load blocking Work piece mass and center of gravity Y Center of gravity X Work piece no.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Table of Contents

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Table of Contents

e r t y No. q w e r t y u i o !

Environment

How to Order w e r t q y u i o !0 !1 !2 !

4-channel Flow Monitor ( compatible)

W Line name 9th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot