10%, 50/60 Hz10 A5.5 A (100 VAC) to 2.5 A (240 VAC)Refer to alarm function.RS-232CApprox. 28.7 lbs (13 kg)Power cable, Foot for fixing, Splashproof coverCE marking, UL (NRTL) standards, SEMI
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)0.6 to 5 V ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.
psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12
10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)1 to 5 V ?
10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)1 to 5 V ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?