SMC Corporation of America
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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 1996 D-036 P-98 (M) 2nd printing May, 2001 D-SMC.L.A. P-80 (JT) All specifications in this catalog are subject to change without notice. Printed in Japan.

Refer to p.0-20 and 0-21 for Safety Instructions and common precautions on the product mentiond in this catalog, and refer to p.2.0-3 to 2.0-4 for precautions of every series. Warning Maintenance If a workpiece is to be held by using the toggle, make sure to periodically check that the workpiece has not shifted during the acceleration of the movement.

Plug-in manifold for VQ1*0* valve, Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN W/CHECK VALVES, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.61671 lb

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

gauge E Round pressure gauge G Panel mount (with set nut) P 0.02 to 0.2MPa setting 1 Non-relieving type N Flow direction: Right to left Display units for product name plate and pressure gauge: PSI, F.

mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Note ) Consult with P/

Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P

and steel piping P = Operating pressure [MPa] l = Length of piping [mm] Internal cross section a (mm2) Nominal size O.D.

L mm Gripping point L mm 4 Series MHS2 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-16D to 25D 2-3.4, counter bore dia. 6.5 Counter bore depth SC (mounting hole) WA, depth 1.5 AA RA 3 AB RA VA, depth VB B NA RB NB RB XA, depth XB O Q 2-M4 x 0.7, thread depth 8 (mounting threads) 20 20 (Open DO) (Closed DC) FX FY FZ CB 7 4-M3 x 0.5, thread depth TB Attachment mounting threads P

Accessory/ Optional specification combinations : Combination available : Combination not available : Varies depending on the model : Available only with NPT thread Optional specifications Applicable filter regulator AW30, 40 Accessories Symbol Accessory/ Optional specifications Combination B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

Both Ends Tapped: CDQ2APN-IDM-trN a63, sBO Nole: Olher dlrensions ars same as rhirugh hoLe type 4w rhhrrrasrutuFirrilMshrmm $enieS Cl|l|ZBP Foot Mount: COOZT-P E -EOU-trf Rod Side Ftange: cDQ2FP n-trDM-!

Note) Please contact P/A for the operation range details for each actuator. The switch is damaged instantly when a load is shortened since short circuit protection is not built-in. Pay special attention to avoid reversing the connection of the brown lead of the power supply line and the black output line connection. 2

Wide operating range (double that of other P/A products) enables stable position detection.

With end lock (R) Functional option Axial piping type (P) For detailed specifications of adjuster options and functional options, refer to option specifications on pages 3 and 4. Standard Strokes Order Made Order Made Specifications Model Standard stroke (mm) For order made specifications of series MXQ, refer to page 42.

Solenoid specifications 5 (R1) 3 (R2) 1 (P) 0.35W (Standard) 0.1W (With power saving circuit, when energized) 4 (A) 2 (B) Power consumption N.O. N.O. Coil rated voltage 12/24VDC 5 (R1) 3 (R2) 1 (P) Flow characteristics 4 (A) 2 (B) Flow characteristics C[dm3/(s.bar)] 0.36 0.32 N.C. N.O. 5 (R1) 3 (R2) v 0.1 0.08 b 0.39 0.33 1 (P) 2-position, single/double 4-position, dual 3 port

Contact P/A regarding applications in which hysteresis becomes a problem. Contact protection box internal circuits Lead wire colors inside the [ ] are those prior to conformity with IEC standards.

Retraction Auto switch mounting screw (M3 x 0.5 x 10l) 78(First-stage stroke) Auto switch spacer First-stage stroke extension Auto switch mounting nut 150(Full stroke) Full stroke extension Consult P/A for intermediate strokes of a full stroke. 2 Series RZQ Theoretical Output Theoretical Output Table 1 [N] Air pressure [MPa] (with same air pressure applied to each port) Piston area [mm2