[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-/12-Series, Clean Series]· Compatible with a clean environment.· Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]· Compatible with use in environments where copper and fluorine materials are undesirable.· External dimensions are the same as the standard model. [21-/22-Series, Copper/Fluorine/Silicone-Free + Low Dust Generation]· Compatible

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [21-/22-Series, Copper/Fluorine/Silicone-Free + Low Dust Generation]Compatible with environments with copper, fluorine and silicone material restrictions. Structure equivalent to the Clean Series (grease and packaging form differ from the Clean Series).

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

Features"10 Series": Clean Series· Suitable for cleanroom environment.· Prevents generation of dust in cleanrooms."20-Series": Copper-free and fluorine-free specifications· Suitable for environments where copper and fluorine materials are undesirable.· External dimensions are the same as the standard model."21-Series": Copper/fluorine/silicone-free + Low Dust Generation· Suitable for environments

Features"10 Series": Clean Series· Suitable for cleanroom environment.· Prevents generation of dust in cleanrooms."20-Series": Copper-free and fluorine-free specifications· Suitable for environments where copper and fluorine materials are undesirable.· External dimensions are the same as the standard model."21-Series": Copper/fluorine/silicone-free + low dust generation· Suitable for environments

[Features] · Low power consumption: 0.5 W (standard type, without indicator light) (Current draw: 21 mA at 24 V DC) · Body width: 10 mm · High reliability · Suitable for use in vacuum applications · Suitable for use in copper and fluorine-free applications · Attractive design with bright color tones

[Please Refer to the Following Pages of the Catalog]· P. 10 Direct piping type, base with integrated manifold, individual wiring, C-Kit· P. 15 Base piping type, base with integrated manifold, individual wiring, C-Kit· P. 18 Base piping type, base with integrated manifold, serial transmission, S-Kit· P. 20 Blanking Plate Assembly· P. 20 Spacer for single SUP· P. 21 Spacer for single EXH· P

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-/12-Series, Clean Series]· Compatible with a clean environment.· Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]· Compatible with use in environments where copper and fluorine materials are undesirable.· External dimensions are the same as the standard model. [21-/22-Series, Copper/Fluorine/Silicone-Free + Low Dust Generation]· Compatible

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [21-/22-Series, Copper/Fluorine/Silicone-Free + Low Dust Generation]Compatible with environments with copper, fluorine and silicone material restrictions. Structure equivalent to the Clean Series (grease and packaging form differ from the Clean Series).

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [21-/22-Series, Copper/Fluorine/Silicone-Free + Low Dust Generation]Compatible with environments with copper, fluorine and silicone material restrictions. Structure equivalent to the Clean Series (grease and packaging form differ from the Clean Series).

[10-/11-Series, Clean Series]Compatible with a clean environment. Prevents generation of dust in cleanrooms. [20-Series Copper-Free and Fluorine-Free Specification]Compatible with use in environments where copper and fluorine materials are undesirable.