Fluoropolymer Tubing Variations 32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.
Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective
Load voltage 24 VDC,100 VAC 24 VDC (10 to 28V) 28 VDC or less Load current range Indicator light 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less D-Z73 D-Y59B D-Y59A Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 2-wire type 3-wire type Solid
VZS2150-5MZ 1 5 Embedded type One-touch fitting Applicable tubing O.D.: 4 C4 2 stations are needed to mount control unit.
Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch
F99] <> [F99] [F99][ini] [ini][] [oFF] [on] 5 [F99] -53No.PF-OMP0001CN-F / ()() 1[Hi][] 1 1[Lo][] 1 1 () 1 // 1() -54No.PF-OMP0001CN-F [LoC][][LoC] 1[LoC]1 < -> 5[UnL] [F 0] [LoC] 5 [LoC] [UnL] -55No.PF-OMP0001CN-F < -> [F81] 5 [UnL] [F 0] [LoC] 5 [LoC] [UnL] ( ) [000] 1 [UnL] [FAL] 3 [LoC] /30 -56No.PF-OMP0001CN-F [000] <> [UnL] 5 ( ) 1 1 -57No.PF-OMP0001CN-F
IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7
No.IP80-OM00019-B / / * 3-4 5 1. 5 2. 6-7 2-1 IP8000 6 2-2 IP8100 7 3. 8-9 3-1 IP8000 8 3-2 IP8100 9 4. 10-12 5. 13 5-1 13 5-2 13 6. 14 7. 15-17 7-1 16 7-2 17 7-3 17 8. 18 9. 18-20 10. 20-22 11. 23-25 11-1 23 11-2 IP8100 23 11-3 IP8000 24 11-4 24 11-5 25 12. 26 13. 27-33 2 A (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic
(It is recommended to ground with resistance of 100 ohms or less) Accessories Seal cap: 5 pcs.
Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .
Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .
APPLICATION 5 3. SPECIFICATIONS 5 4. HOW TO ORDER 6 5. TROUBLESHOOTING 7 6. CONSTRUCTION / PARTS LIST 89 7. REPLACEMENT PROCEDURE 1012 8. DISASSEMBLY DRAWING 1314 9. DIMENSIONS 15 REGULATOR Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.
5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.
Note: 1in = 25.4mm 8mm2 = 1Cv 1g = 0.0353oz 5 Series AKH/AKB Check Valve with One-Touch Fitting Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Parts list No.
weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm
position exhaust center Option Port size 0 Sub-plate side ported 1 Sub-plate bottom ported Nil None 02 00 Without sub-plate Rc 4 Without sub-plate (For manifold) PA Non-locking manual override 1 4 Rc 3 8 Rc Option 03 04 1 2 Caution Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-33 4 Construction 2 position single: VSA4130 2 position double: VSA4230
For manifold type 30, 31 VP Standard SY1 3 5 L 1 M3 VG : Body ported (Cv: 0.008) VP Standard SY1 4 M 5 1 (Cv: 0.008): Base mounted VQ 3 port Piping port Rated voltage VQZ For DC M3: With sub-plate : Without sub-plate 5 6 V S R 24V DC 12V DC 6V DC 5V DC 3V DC VZ VS Sub-plate style For manifold type S41 For AC (50/60Hz) 1 2 3 4 100V AC 200V AC (With gasket and screw) 110V AC [115V AC] 220V
transmission type are only available with 5 (24 VDC).
E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.