MHx-OMU0057

General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

10 Max acceleration/deceleration [mm/s2] 5000 Positioning repeatability [mm] 0.01 (Lead H0.02) Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw(LEKFS), Ball screw + Belt(LEKFSR L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor size 42

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor size 42

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing speedmm/s*6 35 or less 30 or less 30 or less Positioning repeatabilitymm 0.02 Screw leadmm 6 8 8 Impact/Vibration resistancem/s2*7 50/20 Actuation type Ball screwBeltTop mounting, Ball screwIn-line Guide type Sliding bearing Operating temperature range 5 to 40 Operating humidity rangeRH 90 or less (No condensation) Motor size 42

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear guide (Circulating type) Operating temperature range[] 5 to 40 Operating humidity range[%RH] 90 or less (No condensation) Motor Size 28 42

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel) Guide type Linear guide(circulating type) Operating temperature [] 540 Operating humidity [%RH] 90 or less(no condensation) Motor size 28 42

LEC-OM005xx

Press the MENU key or press the ESC key twice to return to the menu screen. 42 - (2) Operation check by test drive in normal mode When connecting to LECPA, the function Test drive cannot be used. TB Ver2.1 or more: When connecting to LECPA, the item Test drive is not displayed in Test menu. Select the test function Press the MENU key to shift to the menu screen.

Step Motor Driver （ Pulse input type ）

Please refer to 6.2 (3) Pulse signal input circuit for details of pulse input circuit. 42 - Define the ratio of electronic gear of pulse signal input. Undefined parameter 11 : "Electronic gear (numerator)"(Default: 1) Undefined parameter 12 : "Electronic gear (denominator)"(Default: 1) Undefined parameter No.11 This product controls LE series motor (800 pulse per rotation).

LEC-OM034xx

65500 mm/s2 Data writting 28 Pushing force 1 0 to 30 10% 29 Threshold 1 0 to 30 10% 30 Pushing speed 1 0 to 255 mm/s 31 Positioning thrust 1 0 to 30 10% 32 H 33 L In pos 2 0 to 65500 0.01mm ID2 34 to 53 Same as ID1 ID3 54 to 73 Same as ID1 ID4 74 to 93 Same as ID1 ID5 94 to 113 Same as ID1 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 42

IDX-OM-W016

73 31 36 154 21 330 231 15 IDFA4E to 11E B A D E Q SWITCH WITH LAMP AIR INLET THERMOMETER EVAPORATION AIR OUTLET G F C DRAFT AIR OUTLET VENTILATION VENTILATION (O.D.10 LENGTH:0.8m) DRAIN TUBE TERMINAL BLOCK (820) J K L H 4-13 P M N POWER SUPPLY ENTRY(17) GROMMET Measuremm Model Thread Size A B C D E F G H J K L M N P Q IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 Rc3/4 270 80 230 32 15 31 42

5 Port Solenoid Valve

Warning Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 3 to 5 Rc1/4 8 to12 Rc3/8 15 to 20 Rc1/2 20 to 25 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Follow the procedure of the manufacturer when fittings other than SMC is used. 4. Piping Make P port piping so that supply air pressure does not become lower than operating pressure while operating.

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

Tightening torque for piping Connection thread Aprropriate tightening torque(Nm) Rc 1/4 8 to 12 Rc 3/8 15 to 20 Rc 1/2 20 to 25 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/2 40 to 42 Rc 2 48 to 50 Rc 21/2 Rc 3 5. Piping to products When connecting piping to the product, avoid mistakes regarding the supply port, etc. 5 Wiring Caution 1.

Fieldbus Device Handheld Terminal

(page 42 to 46)) 5. Select the setting value with the , , and buttons and press button. 6. Press the button to complete the setting. To copy the set value to channels of the same type in the unit, press the button. 7. Press the button. Copy is completed, and the screen returns to the channel parameter selection screen. -41No.EX-OML0011-C No.

V100 Series

When instructions are given in the Specific Product Precautions, follow these specifications. 1/2 20 to 25 3/4 28 to 30 1 36 to 38 1 1/4 40 to 42 1 1/2 48 to 50 2 48 to 50 3) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

AMX-OM-D023-D

R 1 1/4 40-42 R 1 1/2 48-50 R 2 48-50 4 - If there is a risk of loosening by vibration Use sealant which does not affect the product. (5) Performance The performance of the silencer may depend on the pneumatic circuit or operating pressure. 2.

VND Series

Warning Caution Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Rc2 48 to 50 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 6.

Parallel Type Air Gripper

External gripping 9.8 30 42 65 force D I.D. Internal 17 40 66 104 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 6.3 24 28 45 force I.D.

Space Saving Vacuum Ejector Vacuum Pump System

Avoid actions that fall into the precautions mentioned in this Operation Manual. 42 - Doc. no. ZQ-OM00801-D Revision history Edition A: Product No. of the silencer was corrected. Edition B: Fitting series was changed. The material of the nozzle and diffuser was changed. Edition C: Air consumption on page 30 was corrected. The graphs of Exhaust Characteristics on page 36 were replaced.

CEx-OMP0016

1 Hard anodized 37 Parallel pin Stainless steel 4 3 Head cover WL Aluminum alloy 1 Hard anodized 38 Tension plate Carbon steel 4 Nickel plated 4 Piston yoke Aluminum alloy 1 Anodized 39 Side cover L Aluminum alloy 1 Hard anodized 5 Piston Aluminum alloy 2 Hard anodized 40 Side cover R Aluminum alloy 1 Hard anodized 6 End cover Special resin 2 41 O-ring NBR 2 7 Wear ring Special resin 2 42

EXxx-OMU0020EN

LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1. Markers 51 10.2. Y Connector 52 10.3.