7

6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

(Order) Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 Output pressure [High byte] 1 Output pressure [Low byte] 2 (Reserved): Not required. 3 (Reserved): Not required. 4 Diagnostic information [High byte] 5 Diagnostic information [Low byte] 7 - Output pressure Output pressure of the product is sent. 0 1 BYTE 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Output pressure(16Bit) Value Monitoring

MRHQ

2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Series IDG

(Check the specifications for each series.) 6. Locations with high moisture and dust. (Contact SMC in advance.) 2. Adhere to the fluid and ambient temperature ranges. The fluid and ambient temperatures are determined by the equipment being used.

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

HEC-OM-S008

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.

CG1-OM0227

24. 1) 2) 3) 1) 2) 1.5~2 2 2. 2-5. ,AS 8 2-6. 2-6-1.

ML1C

4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Thermo-con

Contents 1 1 200 to 220 VAC 100 to 240 VAC 2 2 200 to 220 VAC 100 to 240 VAC PE 2 1 3 3 PE HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2. Communication connector (RS-232C or RS-485) D-sub 9 pin (socket) Holding screw: M2.6 Signal contents 3 2 Pin No. RS-232C RS-485 5 4 1 1 Unused BUS+ 2 RD BUS 3 SD Unused 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to page 8-16-9 and 8-16-10 for detailed selection procedures. 8-16-6 6 Model Selection Series CY1F (2) CY1F/M2 (1) CY1F/M1 (3) CY1F/M3 30 30 30 MX CY1F25 20 20 20 MTS CY1F25 CY1F25 MY 10 10 10 CY MG 5 5 5 Moment Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

PFxx-OMU0002

:-] and ISO8573-1:2010 [3:6:-]. 2: When using the accumulated value hold function, calculate the product life from the operating conditions, and use the product within its life.

PF-OMM0004_C

[F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c. Add/dEC OUT1 (31 ) OUT1 OUT1 ( [n2AH]) ( [n2dH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -39No.PF-OMM0004-D d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Clean Gas Filter

MPa, Vacuum 1.3 x 10-6 kPa 5 to 120C HAA HAW Operating temperature Element proof differential pressure Max. 0.5 MPa AT Element reverse differential pressure Max. 0.07 MPa 0.01 m (Filtering efficiency 99.99%) Filtration Note 2) IDF IDU Particle with 0.1 m or larger 1 pc./6 L Purification in the outlet side Note 2) IDF FS Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless

Valve Controller

VXF*-OML0001-A PRODUCT NAME Valve Controller MODEL / Series / Product Number VXFC06D VXFC10D VXFC06D-6 VXFC10D-6 Contents 1. Safety Instructions P2-5 2. Specifications P6 3. Name of Parts P7-8 4. Wiring P9 5. Description of operation P10-11 6. Cascade connection P12-13 7.

CRB2-OM00001

Installation 6 4-1 Air Supply 6 4-2 Piping 6 4-3 Shaft Load Limit 6 4-4 Coupling 7 4-5 Operating Environment 8 4-6 Using Body As Flange 8 5. Setting of Rotation Time 9 5-1 Moment of Inertia 9 11 5-2 Kinetic Energy 12 5-3 External Stopper 1314 6. Maintenance and Inspection 1516 7.

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.