Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

3 Port Solenoid Valve

Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 5 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported S070C-G-32 Grommet

JCRB-OM00003

Table 4 BoltTightening torque Size Bolt Recommended tightening torque 10 M3 0.63 Nm 15 20 M4 1.50 Nm 30 M5 3.00 Nm 40 Fig.8 Mounting 2 Using a plate with tapped holes (Refer to Fig. 9). L dimension when the unit is used as a flange is shown in the table below.

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

ML1C

Note Auto switch model Switch mounting screw M2.5 x 10 L D-E7A.80A BMY1-025 25 32 40 Switch mounting nut D-M5 D-M5W D-M5T Switch mounting screw M2.5 x 12 L BMY2-025 Switch mounting nut 1116 ML1C Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.

MLGC

M N O Q R S Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9 70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32

VCB

44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

Free-Mounting Cylinder with Air Cushion Series CU

L A93L 5m .

MLGC

H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9 70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore

PA300/500/700

1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 Body ported: VPA342VA B 20.4 16.5 NO NC 2(A) 26.5 21.5 2.25 Switch mark 26.7 23.2 Bracket (Mounting hole) 23.2 (PA port) Rc 1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

11 5.5 M3 x 0.5 8 L 12 7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

Thermo-chiller

Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

VQ4000

Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.

XM, XY

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C