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Connector pin assignment 6 Specifications Configuration 9 10 7 Pin number Signal name PORT1 PORT2 8 TD+ 1 1 2 1 2 EX600-SPN3 Model EX600-SPN4 No. Description Function 2 RD+ To obtain more detailed information about operating this product, please refer to the SMC website (URL https://www.smcworld.com) or contact SMC directly.

Metal piping attachment Indicator LED (OUT1) Indicator LED (OUT2) Lock ring Function selection mode PFM7 button (SET) Nominal thread size Required torque S Connector Piping port (OUT side) Rc (NPT)1/8 7 to 9 Nm Rc (NPT)1/4 12 to 14 Nm Thank you for purchasing an SMC PFM7 Series Digital Flow Switch.

Fig. 9 Normal output OFFt0 Fig. 10 Sequence OFF0 Fig. 11 Sequence 6. Cascade connection There are only outputs up to 10 points (6 points in the case of VXFC06A) on a single board. However, it is possible to increase the output points by cascading (multiple board connection).

Electrical Standard: O/C DC5V 25mA or less (9) Dip switch for setting cascade or temporary stop.

This may cause damage. 9. If product is to be used in a public place, ensure product is not directed at people or used in a manner that could adversely affect the environment. 10.For other cautions, refer to the 2 Port Solenoid Valves for Fluid Control Precautions. 11.

No.VN-OMP0001 / / / / Series Series Series Series -2,3 -4 -4 -4,5 -5 -5 -5 -6 -78 -9 -1VN-OMP0001 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

When the Upper temperature limit alarm and the DC power voltage alarm go off simultaneously, D2 will be 23X1+22X0+21X0+20X1=9(=39H). HEC 4-4 Details of Communication Format 4-6 Reading temperature average data Note) For this product, the average temperature data, Tm, indicates the temperature of the external sensor.

Construction and Outer dimensions --9 5. Period and scope of warranty 10 6. Parts replacement procedure 11 1 XL*-OML0013-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

No.XL-OMY0003 L // XLH XL-OMY0003 2 11 4 , , , , 2. 2 6 3 7 4. 8 5 9 6. 10 1 XL-OMY0003 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Parts replacement procedure 9 1 XL-OMU0002-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

1/12 FGX-OM-L009-B / / S L FGES--AFGEL--A 2/12 FGX-OM-L009-B 3 FGESL 5 7 8 8 9 10 3/12 FGX-OM-L009-B (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

Troubleshooting 9 6. Exploded View 10 7. Drawing 11 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Example of fail-safe circuit Fail-safe circuit (7) (9) FU port FB port FA port (6) Air (8) Manual EB Manual EA cylinder G (3) Shut off valve Shut off valve (1) (2) E-STOP valve Servo valve Servo valve Air supply port (4) R3 port (5) (10) R2 port R1 port P port Air servo cylinder circuit (Main circuit) Components No.

No.PS-OMS0004CN-D // PSE570/573/574 2 8 9 10 10 14 15 15 17 -1No.PS-OMS0004CN-D (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

Design the machinery so that human injury and/or damage to machinery and equipment will not be caused when machinery is stopped by a safety device under abnormal conditions, a power outage or a manual emergency stop. 9. Consider actions when operation is restarted after an emergency stop or abnormal stop.

No.D-S-OMS0002-B PRODUCT NAME Heat Resistant Solid State Auto Switch MODEL / Series / Product Number D-M9#J# Series Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 8 Definition and terminology 9 Mounting and Installation 10 Installation 10 Maintenance 12 Troubleshooting 13 Specification 17 Specifications 17 Dimensions 18 -1No.D-S-OMS0002-B Safety

1.5 8 Lateral side mounting Location pin hole Model Mounting bolt Max. tightening torque Nm Max. screw-in depth (l) mm Hole Height h mm diameter d mm M(D)HR3-10 M3x0.5 0.88 6 3 +0.02 0 6 M(D)HR3-15 Vertical side mounting Location pin hole Model Mounting bolt Max. tightening torque Nm Max. screw-in depth (l) mm Hole Height h mm diameter d mm M(D)HR3-10 M3x0.5 0.88 6 3 +0.02 0 6 M(D)HR3-15 9

Therefore, take appropriate measures to ensure air quality, such as by providing an aftercooler, air dryer, or water separator. 9 - 4. Use the product within the specified fluid and ambient temperature range. When operating at temperatures 5oC or lower, water in the circuit may freeze and cause breakage of seals or malfunction. Measures should be taken to prevent freezing.