ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)11/8, 1/42VX2440.630.630.230.1 to atmospheric pressure0 to 0.9320

ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)11/8, 1/42VX2440.630.630.230.1 to atmospheric pressure0 to 0.9320

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Mounting Basic type Axial foot type Front flange type Rear flange type Single clevis type Double clevis type Front trunnion type Rear trunnion type Integral clevis type Boss-cut basic type B L F G C D U T E BZ Boss-cut front flange type FZ Bore size Cylinder stroke (mm) Refer to the standard stroke table on page 10. 20 25 32 40 20mm 25mm 32mm 40mm Boss-cut front trunnion type

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

One-touch fitting) C6 (6 One-touch fitting)/C8 (8 One-touch fitting) C6: PA/B 4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot pressure range 2 position double 0.25 to 0.7 Port size 3 position A/B ports Ambient and fluid temperature C

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Location Direction Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) A, B port piping specifications Operating pressure range External pilot operating pressure range MPa SX3000 SX5000 SX3000 2 position single Pilot pressure range 2 position double P, R ports 0.25 to 0.7 Port size 3 position A, B ports Ambient and fluid temperature C

ISE7xG.eng

Bracket A Bracket B [F 0] Display units, switch output specifications and diagnostic information selection function ISE70(G): 0.500 MPa/ISE71: 0.800 MPa/ ISE75G: 1.000 MPa/ISE76G: 2.50 MPa/ ISE77G: 5.00 MPa/ISE78G: 8.00 MPa Pressure setting Cross recessed round head screw: Nominal size M4 x 6L Cross recessed round head screw: Nominal size M4 x 6L Item Default setting ISE70(G): 0.050 MPa/ISE71

EXxx-OMP0004CN

D E F [2016 7 ] G [2019 6 ] H [2019 11 ] I [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.EX-OMP0004CN-I

ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)21/4, 3/84VX2241.900.520.620.1 to atmospheric pressure0 to 1.0460

Compatible Fluid: Vacuum / Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 4, Option

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 1/4, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 4, Option: With

Body Material: SUS, Detailed type: None, Function: -, Pilot port thread type: G 1/8, Diaphragm: PTFE

indicator, Body Material: PFA, Detailed type: None, Function: -, Pilot port thread type: G 1/8, Diaphragm: PTFE

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 20, Option: With

, Body Material: PPS, Detailed type: None, Function: -, Pilot port thread type: G 1/8, Diaphragm: PTFE

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Option: CG (C + G), Attachment: S (Pressure Switch), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Standard

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: F (G), Port Size: 03 (3/8), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: N (Non-Relieving Exhaust Mechanism)