08-ca2k-e

9 @0 21 @2 Cushion seal Urethane Set of left nos. !8, !9, @0, @2. Rod seal NBR 21 is a non-replaceable part, so it is not included in the seal kit. Piston seal NBR Seal kit includes !8, !9, @0 and @2. Order the seal kit based on each bore size. Do not disassemble the trunnion style. Seal kit includes a grease pack (40, 50: 10 g, over 63: 20 g).

Ionizer Nozzle type IZN10 Series IZS

piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5 2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21

30

B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore size Maximum thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13 17 22 27 8 9 13 15 0.5 0.5 0.75 1 7 8 11 13.5 21

Wireless System

Analog Input Unit p. 8 y Communication Cable with Connector/ Communication Connector p. 18 Analog Output Unit p. 8 Analog Input/Output Unit p. 8 uPower Supply Cable with M12 Connector (A-coded) p. 19 End Plate (D side) p. 8 uPower Supply Cable with M12 Connector (B-coded) p. 20 End Plate (U side) p. 8 iPower Supply Cable with 7/8 Inch Connector/ Power Supply Connector p. 21

Series GS40 Digital Pressure Sensor

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

Series GS40 Digital Pressure Sensor 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

33

(White) (Black) (Green) Approx. 100 mm Grounding cable Circulating fluid fill port lid Circulating fluid outlet Rc1/2 Operation display panel 5005 mm 21 mm Circulating fluid return port Rc1/2 3775 mm Handle (Same for the opposite side) Power cable (3 m) with plug Fluid level indicator Model no. label 6155 mm 5805 mm 100 VAC 200 VAC 1235 mm 3485 mm Power cable Note) Dustproof filter Caster

energy saving effect

. * For HRSH250-A-20 Circulating fluid temperature [C] When a load is stable 0.1C Outdoor air temperature: 32C Circulating fluid temperature setting: 20C Heat load in the users equipment: 25 kW Power supply: 200 V 60 Hz Circulating fluid flow: 125 L/min@0.5 MPa External piping: Bypass piping + Heat load 21 Conditions 20 19 25 kW load Heat load fluctuation (0 kW 25 kW) 0 kW load 0 10 20 30

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

5H9 ( ) depth 6 +0.030 0 (160) 110 4 x M6 x 1 depth 10 LEJ 18 M4 x 0.7 depth 8 (F.G. terminal) 84 105 (3.1) LEL Motor cable (6) 56 100 130 100 LEM 35 LEY Encoder cable (7) 25.5 36.5 64 Note 2) (128) Note 2) 94 5H9 ( ) depth 6 +0.030 0 6 50.5 LES 58 LEPY LEPS LER Encoder Z-phase detecting position L LEH A (Table traveling distance) (58) 167 (B: With lock/207) LEY -X5 (60) Stroke 17 37 (4) 21

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

Series AK1000

MPa) Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

+0.030 4H9 0 depth 4.5 K cross view (Closed) +0.052 32H9 0 depth 1.5 Auto switch mounting groove (4 locations) 76 Width across flats 13 (4 locations) M5 x 0.8 (Finger closing port) 2 x M5 x 0.8 Vacuum port M5 x 0.8 (Finger opening port) H 4 x M8 x 1.25 (Piston rod thread and rack thread) 33.2 11.5 6.5 12 16 16 16 1 27 18 O S 12 23.5 52 29 K (81) 18.5 38 12 29 29 14 4 4 14 40 When open F 21

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

P.C.D.36 (Mounting thread) 57 54 60 120 120 A 45 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 13 25 25 Finger closing port Finger opening port 4 x M4 x 0.7 thread depth 8 Finger closing port Finger opening port (A, B common view) M5 x 0.8 thread depth 5 Vacuum suction port +0.02 0 2 x 4 depth 8 44 Auto switch mounting groove (A, B common view) 14h9-0.043 0 18 1.5 55.5 9 24.6 2-3 3.4 4.7 37 (60) 21

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21

Information

27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Rotary Actuator/Vane Style Series CRB2

MSZ 2 20 CRQ2X MSQX 0 -0.030 4 6.5 10 MRQ 30 45 Body B (90) h Keyway dimensions b l Body A h (h9) l b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2 x M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE 10g6 -0.005 -0.014 0 -0.052 25h9 B port A port 63 20 2 x M5 x 0.8 Connection port for side port 21 D3 x 5.5 depth 17.5 (Body A side only) 3 x 5.5 depth

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

1

Special electrical entry direction 2 XSA Series Specifications Model XSA1-11 2 XSA1-21 2 XSA2-22 XSA2-32 XSA2-43*3 XSA3-32 3 XSA3-43 Action Normally closed Fluid Air, Inert gas Orifice diameter mm 2 3 4.5 6 4.5 6 Withstand pressure MPa(G) 1.5 Minimum operating pressure Pa(abs)/OUT side 1 x 106 Maximum operating pressure MPa(G)/IN side 1.0 Maximum operating pressure differential MPa *1 0.8

Bernoulli Gripper

Body material 30 Nil 30 23 8.7 27 34 M3 x 0.5 6 8.5 3.3 10.5 2.2 8.5 0.8 11.3 11.8 2 4.2 0.8 2.8 27 P 17 S 77 ZNC 40 Nil 40 32 11 3.5 34 42.2 44 48 P 30 S 139 M4 x 0.7 8 11.5 3.6 13.5 2 8.5 1.0 10.5 12 3 5 1 5.8 60 Nil 60 47 21 10 54 64 110 P 67 S 323 *1 The stopper, vibration suppression cover, and plug weights are not included. 13 Bernoulli Gripper ZNC Series Dimensions: 80 Basic type