Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Environment, Applications: Clean Room, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Environment, Applications: Clean Room, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A,

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Environment, Applications: Clean Room, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A,

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Environment, Applications: Clean Room, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm Type LN, MN: with 2 sockets.

Table of Contents

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 600 10kg 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 Pitching Yawing 16kg 18kg 20kg Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Grommet L plug connector MN: Without lead wire WO: Without connector cable G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D, Y: With connector Coil type + + Standard Nil T With power saving circuit (24, 12 VDC only) + + + + + + Power saving circuit is not available for D, Y, DO, YO or W types.

Battery-less

750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) Approx. 300 33.1 48.5[55.5] Refer to page 563 for dimensions with connector cable.

Electric Actuator

700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.

SYJ300/500/700

76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 38.7 Approx. 300 (Lead wire length) 79.4 54.1 [61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 4-4-61 for dimensions with connector cable.

SX

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Mechanically Jointed Rodless Cylinder Series MY1

20 MY3M 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m1 MY1HT/m2 MY1HT/m3 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load mass kg Load mass kg Load mass kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 D20 20 20 -X 10 10 10 Individual -X 100 200 300 400

LJ1H

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

15

T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 150 4.5 2.5 1.2 0.6 0.5 300 2.6 1.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.