REGULATOR

See Check item for tightening torque of pressure gauge. 12 35 Nm 11 6) Pressure gauge adaptor assembly, Plug assembly Procedure Tools Check item Applicable model Process Disassembly 1) Remove the plug. Nominal AR20K-B AR25K-B AR30K-B AR40K-B AR50K-B AR60K-B Spanner Insert the hexagon spanner to hexagon hole of hexagon plug.

MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 3/4 , AFM20-A 40 87.6 9.8 20 45 AFM30-A 53 115.1 14 26.7 30 50 AFM40-A 70 147.1 18 35.5 38.4 75 AFM40-06-A 75 149.1 20 35.5 38.4 75 Model Bracket mount dimensions AFM20-A 30 27 22 5.4 8.4 40 2.3 28 AFM30-A 41 35 23 6.5 13 53 2.3 30 AFM40-A 50 52 26 8.5 12.5 70 2.3

Mini Rotary Actuator

inertia 27 Calculation formulae for moment of inertia 28 Kinetic energy 29 Calculation of required torque 29 Load type 30 Auto switch type for rotary actuator 30 Auto switch specification 31 Proper auto switch mounting position and operating range 32 Cautions on mini rotary actuator with auto switch 33 Maintenance and Inspection 33 Periodic inspection 33 External stopper assembly procedure 35

High Vacuum L Type Valve

17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66 XLS-16-P*G 40 96 113 38 30 35 17 23 87 66.5 XLS-25-P*G 50 121.5 138.5 48 40 40 26 25.5 89.5 69 9 XL*-OMI0013-B 6.Period and Scope of Warranty The waranty period is 0.5 million cycles (under SMCs endurance test conditions), 1 year

Compact Guide Cylinder

M8 x 1.25 20 M8 x 1.25 6.7 11 9 Rc1/8 NPT1/8 G1/8 16 16.5 41 28 92 42 106 82 98 72 50 12 140 M8 29.5 29.5 43 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 13 19 49 35 115 52.5 133 104 122 92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16

Cylinder with Turntable Series MGT

188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 70 80 100 14 14.5 17.5 G 1/4 G 3/8 G 3/8 63 80 100 110 140 166 142 180 210 28 25.5 32.5 NPT 3/8 NPT 3/8 (mm) 25st 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 Series ML1C Construction Component Parts Material No. Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Note Hard anodized Hard anodized Material No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 10 Series ML1C Construction Component Parts Material No. Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Note Hard anodized Hard anodized Material No.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

12, 48 DC 15 to 10% of the rated voltage Allowable voltage (%) Power consumption (W) [Current: mA] (2) DC 1.8 (With indicator light: 2.1) [24 VDC: 75 (With light: 87.5)] Made to Order Specifications (For details, refer to pages 1843 and 1847.) 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz [ ] Start-up 4.5 to 50 Hz, 4.2/60 Hz Apparent power (VA) [Current: mA] (2) AC 100 VAC: 35

240

Table (1) (mm) d 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 OUT OUT port (Axial piping) IN d L Dimensions of a shielding plate (MU-S025) that is sold separately are indicated as reference. OUT port (On both sides) IN port (Axial piping) IN port (On both sides) 18 36 When changing the port location, please order the following plug.

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

CYV

inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18 35

AS-FPQ/AS-FPG

AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12 R 1/8 14.3 33.4 18 18 19.4 26.3 12.8 35.6 20 20 21.9 28.5 15.2 37 33 33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port A C 32 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 3-3 depth 6 +0.02 0 (A, B, C common view) 6-M3 x 0.5 thread depth 6 (A, B, C common view) 29 9h9 0 0.036 32 1 5 15 10 (35

Flow Control Equipment

Universal mounting Model Size (nominal X height) Piece Metric Inch TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 X 15 M3 X 20 1 M4 X 25 TMH-08 TMH-10 TMH-12 M4 X 35 The holder can be used to secure an individual part.

IR1000/2000/3000

EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5 depth 7 75 83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43

Low torque Metal seal type Rotary joint

Temperature rise is reduced by supply of air. 2 Series MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR1-M5 Width across flats: 14 Width across flats: 7 (16.2) M5 x 0.8 14 5 21 34 (8) R1/8 M5 x 0.8 MQR2-M5 MQR4-M5 * 35 * 29 3 +0.1 0 M4 x 0.7 thread length 8 depth 10 5.5 2-M3 x 0.5 thread length 6 P.C.D.38 M5 x 0.8 thread length 10 0.03 * flange: MQR2-F (for

“Going to

Burst prssure Min. bending radius (mm) 10 15 20 27 35 10 15 23 27 35 20 to +60C (Water: 0 to 40C) (No freezing) Polyurethane Operating temperature Material Precautions How to Order Be sure to read before handling.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

thread) 33.4 MDHR2-10E port position 32 B 36 8.5 120 120 9.5 A C 32 Finger opening port M3 X 0.5 Finger closing port M3 X 0.5 25 25 MHZ2 3-3 depth 6 +0.02 0 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port (A, B, C common view) MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ MHL2 Auto switch mounting groove 29 MHR 9h9 0 -0.036 2-4.2 MHK 9.6 4.7 32 1 MHS 4.7 3 10 2-3 (35