(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?
(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?
air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251
air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251
air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525
(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?
10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251 L/min [ANR] {In case of Inlet air
Exhaust Cleaner for Clean Rooms AMP Series 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C 4/5 PORT SOLENOID VALVE.
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C 4/5 PORT SOLENOID VALVE.
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C 4/5 PORT SOLENOID VALVE.
Min. bending radius (mm) 75 60 48 36 24 25 13 100 15 20 30 60 75 Caution Operating temperature 20 to +60C (Water: 0 to 40C) (No freezing) 1. Applicable for general industrial water. Please consult with SMC if using other kinds of fluid. Surge pressure must be under the max. operating pressure.
Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: C (1pc, Valve Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: C (1pc, Valve Closed)
Unit Size: 7 (75mm), Cup Flange Shape: A (with Flange, 42mm x 42mm), Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment, Pressure Switch Output Spec/Unit: C (PNP/with Unit Switching Function)
Unit Size: 7 (75mm), Cup Flange Shape: A (with Flange, 42mm x 42mm), Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment, Pressure Switch Output Spec/Unit: C (PNP/with Unit Switching Function)
Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: w/o Cable, Cable Length: C (20m)
Series: LEY, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: F (High Performance, Step Motor 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: D (Double Clevis, Parallel), Actuator Cable Type, Length: R3 (3m, Robotic), Controller: C9H (EhterNet/IPâ„¢), Controller
Series: LEY, Size: 40, Motor Mounting Position: Top Side Parallel, Motor Type: F (High Performance, Step Motor 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover)