EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 15 V()50001000 4 V PLC 4000 -57No.EX-OMS0026CN EX600 byte EX600 byte EX600 byte byte EX600-SEN3/4 (32 ) 0 4 SI EX600-SEN3/4 (32 ) 4 4 () EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYF (16 ) 0 2 EX600-DME

Digital Flow Switch (Remote type monitor unit)

No.PF-OMN0012-H PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Return Filter

Maintenance parts [1]Replacement Element Table6-1 3) Element number Element type Element Size Port size Symbol (mm) Paper Micromesh 06,08 EP420EM81064L95 10,12 EP020EM91074L117 16 EP520EM02088L158 20,24 EP620EM120119L208 Note) Refer to the Figure 2-1 for the assembly position.

K35-OMW0030

*The numbers in a parenthesis correspond to the component numbers in the cross-section construction drawing on page 25. 16 4. Specification 4-1.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Relationship between the set pressure (16-Bit) and output pressure Set pressure 0 0x02BC Output pressure 0kPa 700kPa (Example) When the set pressure value is 0x02BC, the output pressure is adjusted to 700kPa.

MX-OMP0051

19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31 39 65 65 65 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 32.9 33.9 33.9 33.9 46.9 46.9 32.9 71.9 71.9 16 D-F8 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6

CEx-OMI0064

No. , 15 No.120 No.2131 No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 20 - ,No.131(OUT 15), No. (:ON:OFF) No. 1 2 3 4 5 No. No.

MHx-OMM0057

MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18 16 MHL2-40D M0X1.5 24 12 MHL2-40D M10X1.5 36 20 Nm MHL2-10D M4X0.7 2.1 MHL2-16D M5X0.8 4.3 MHL2-20D M6X1 7.3 MHL2-25D M8X1.25 17.7 6 - 1. 2. 2 <> AS1200-M5AS2200-01 AS1000AS2000 AS1001FAS2051F

LEF-OM007xx

) 6N Motor option Ball screw lead With controller (PNP) 6P With controller (PNP) 6P Without lock Nil Without lock Nil Size Size With programless controller (NPN) With programless controller (NPN) 1N 1N With lock B With lock B 40 32 25 16 40 32 25 16 With programless controller (PNP) 1P With programless controller (PNP) 1P Stroke Actuator cable length 10mm 10mm 12mm 12mm 16mm 16mm 20mm 20mm

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Warning(8) on p.16 8 Alarm for Stroke limit /code: 1-052 is generated. The actuator goes out the stroke limit specified by the basic parameters, Stroke (+) and Stroke (-) if it performs the requested operation.

LEC-OM032xx

Initial Setting.16 4. 1 Gateway unit Communication speed switch (B RATE) .16 4. 2 Setting the switch to change the communication CN2SW.16 4. 3 Setting of controller (LEC).17 4. 4 Setting of EtherNet/IP using RSLogix5000TM.20 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

STOPPER CYLINDER

Bore Chamfered type size Roller type Lever type with shock absorber Round bar type with female thread Chamfered type with female thread 12 10 10 16 10.15 10.15 20 10,15,20 10,15,20 32 10,15,20 40 20,25,30 20,25,30 20,25,30 50 3.

SI unit for EtherNet/IP TM

Installation example n,m L 0 1 2 3 4 5 6 7 8 9 10 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 n,m L 11 12 13 14 15 16 L1 160.5 171 181.5 192 202.5 213 L2 [mm] : L1 shows the dimensions of the VQC1000 series solenoid valve.

SI unit for DeviceNet ®

to 23 Input No. 16 to 23 Address +3 Output No. 24 to 31 Input No. 24 to 31 EX250-SDN1-X102 Item Output (Poll request) Input (Poll response) No. of occupied bytes 4 bytes 6 bytes Address +0 Output No. 0 to 7 Input No. 0 to 7 Address +1 Output No. 8 to 15 Input No. 8 to 15 Address +2 Output No. 16 to 23 Input No. 16 to 23 Sent/Received data Address +3 Output No. 24 to 31 Input No. 24 to 31

EXxx-OMQ0016

Occupied byte Unit Unit part number Input Output EX600-SPN (32 outputs) 0 4 SI unit EX600-SPN (32 outputs diagnostic) 4 4 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) (with open circuit detection) 1 0 EX600-DXD Digital input unit (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs) 0 1 EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYF (16 outputs

SI unit for CC-Link

Correct the total number of outputs connected to the EX12#-SMJ1 unit to 16 outputs or less Too many solenoid valves (more than 16 outputs) Check that the total number of outputs for the connected solenoid valves is 16 or less -23No.EX-OMB0014-H 1. Be sure to turn the power OFF before replacing the SI unit.

Fieldbus system (SI unit compatible CompoNet TM )

Check the connector between SI unit and manifold for the connection failure such as a bent pin Correct the connection between SI unit and manifold. 9 Valve malfunction The max. number of outputs of the product is 16. Be sure to keep the number of outputs 16 or less. Valves over a total of 16 outputs will not operate.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Electric actuators / Common precautions . 9 2.1 Wiring/Cables . 9 2.2 Design/Selection . 10 2.3 Mounting . 11 2.4 Handling . 12 2.5 Operating Environment . 14 2.6 Maintenance . 15 2.7 Actuator with Lock . 15 2.8 Design/Selection . 16 2.9 Handling . 16 2.10 Mounting . 17 2.11 Power Supply . 18 2.12 Grounding . 18 2.13 Wiring . 18 2.14 Maintenance . 19 3.