Series 10-, 21- AF-A Air Filter

8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Lock-Up Valve IL201/211/220 Series

9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !

AZ1000

PTFE 4) 5) No code Q No code VS TF -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa Ports Code Ports 2 ports 3 ports 4 ports 3) Not available with SHP material. 4) PTFE

AK1000

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

WRF100

Fixing method for protective covers WRF100-T200 WRF100-S200 WRF100-T240 WRF100-S240 WRF100-T270 WRF-C200 WRF-C240 w WRF-C270 Tightening torque for cover mounting bolts Location Tightening torque (N.m) t r e r y 3.0 to 4.0 5.0 to 7.0 1. q Mount the cover L (q) and cover R (w) on the cylinder body. Mount the cover L (q) on the side where a limit switch is mounted.

VM

port 2 port Bottom ported 3 port 2 port Side ported 3 port 2 port One way roller lever Bottom ported 3 port 2 port Toggle lever Side ported 3 port 2 port Bottom ported 3 port 2 port Side ported 3 port 2 port Bottom ported 3 port 2 port Green Green Green Green Black Black Black Black Red Red Red Red Bottom ported 3 port 2 port Push button Side ported 3 port 2 port Bottom ported 3 port 2 port

Manifold Specifications

3-3-7.

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

SI Unit for Vacuum Manifold

Table 3-1.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VR A + 3 VH OUT IN B EXH.

Clean Regulator/Fluororesin Type

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50

4 Port Solenoid Valve Series VQD1000

3 ! !

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

-3) and Operation Manual before use.

RSH

3 @0 !7 o !6 i @7 !9 #9 @1 @9 #2 @6 @4 !0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

Residual Pressure Release Valve

17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

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