Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7

VZA2000

3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-8

HRX-OM-Z015

Remote modeOpen A The time of FLT alarmClose FLT Operation stop FLT alarm status signal B The time of FLT alarmOpen A The time of WRN alarmClose WRN Continuing operation WRN alarm status signal B The time of WRN alarmOpen ALM Alarm status signal A The time of alarmClose B The time of alarmOpen RDY TEMP READY signal A TEMP READY statusClose B TEMP READY statusOpen A EnabledClose FREZ Anti-freezing

Vacuum Gripper

Removal of the cup. (1) Remove the suction cup with adapter from plate B using a spanner. (2) Loosen the bolt (M4x8), then remove plate B from plate A. Be careful not to lose the O-ring. (3) Loosen the bolt for sealing (M6x8), then remove the cup from plate A. Completion drawing 2.

Series PF2W Digital Flow Switch For Water

Pin description 1 DC(+) 2 NC/Analog output A (44.2) 3 DC() 4 OUT (mm) A B Output specification Output for monitor unit only 42 62 Output for monitor unit + Analog output 52 72 Flow direction 309 B Series PF2W Dimensions: Remote Type Sensor Unit For Water PF2W511-(N)B 148 32 80 70 58 46 45 36 2 x Port size 45 2 4 x 5.5 (44.2) A (mm) A B Output specifications Output for monitor unit only 63

SYJ300/500/700

M3 x 0.5 A port M3 x 0.5 M5 x 0.8 X port Note) M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M5 x 0.8 M3 x 0.5 1.5 0.17 0.36

HRX-OM-W002

A/B D.IN1 CON TYPE No.9 screen Contact input signal 2 function OFF OFF/STOP/SW D.IN2 SEL No.10 screen Contact input signal 2 type ALT ALT/MT D.IN2 SW TYPE No.11 screen Contact input signal 2 operation A A/B D.IN2 CON TYPE No.12 screen Contact output signal 1 function RUN 1 D.OUT1 SEL 5.5.5 No.13 screen Contact output ignal 1 operation A A/B D.OUT1 TYPE No.14 screen Contact output

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

REC

Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0

HRX-OM-T002

-5 (4 cores x 5.5mm2) (50/60Hz) *including ground 3phase 20 380 to 415VAC HRS090-A-46(50/60Hz) HRS090-W-463phase 460 to 480VAC (60Hz) *1: A specified earth leakage breaker is installed for option B [Earth leakage breaker] of each model.

High Vacuum L Type Valve

nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76

Speed Controller with Indicator

Do not use the sealant in any form other than a tape type. 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body A. If the tool is in contact with the body A, this may cause the body B to come off. 4.

HRX-OM-Y120

Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

Series AK1000

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

Thermo-chiller

Applicable model Dimension in [mm] A B C HRS100/150-A-20/40-A 32.7 [830] 11.9 [302] 61.1 [1552] HRS100/150-W-20/40-A 22.4 [570] 15.8 [401] 53.5 [1353] C 118 A B Option symbol With Earth Leakage Breaker B HRS 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.

EX510

DIA BF PWR(V) RUN COM C COM D COM A COM B INPUT COM A to D When COM A to D are receiving data. When COM A to D are not receiving data. Light is turned on. Light is turned off. Input unit (Input device) is connected will illuminate when communication is working properly.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Manifold Specifications

Series VZ1000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted

HRS100/150

HRS 100/150 HRS 100/150 Applicable model Dimension [mm] A B C HRS100/150-A-20/40-A 830 302 1552 HRS100/150-W-20/40-A 570 401 1353 C HRSH 090 HRSH 118 HRSE A B Option symbol With Earth Leakage Breaker B HRZ HRZD HRS 20 B With earth leakage breaker HRW A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.