VXR21/22/23 S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)
Standard specifications AL30 AL40 AL60 AL10 AL40-06 AL20 AL50 Model Port sizes 1/4, 3/8 1/4, 3/8, 1/2 1 M5 x 0.8 3/4 1/8, 1/4 3/4, 1 Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa 1/4: 30 3/8: 40 1/2: 50 Note 1) 1/4: 30 3/8: 40 220 4 50 15 190 Minimum dripping flow rate [L/min (ANR)] Oil capacity (cm3) 55 135 7 135 25 135 135 Recommended lubricant Class 1 turbine oil (ISO
TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2
Refer to How to Order ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS 1 1 End block R 2 End block L 3 ZQ13M-Note) Ejector assembly 4 ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold 5 Exhaust block gasket 6 Note) Refer to page 2 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working procedure Disassembly Loosen and remove the hexagon socket head cap bolts q.
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.
How to use DIN connector Indicator Light/Surge Voltage Suppressor Disassembly 1) Loosen screw (1) and pull up housing (2) in the direction of screw (1) to remove the connector from the body (solenoid). 2) Pull out screw (1) from housing (2). 3) On the bottom part of terminal block (3), there is a notch (9).
Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the
VER VEA 5 (R1) 4 (A) 1 (P) 2 (B) VY2 OFF state VBA VBAT F1 < F2 condition: See figure q. 2 (B) 3 (R2) AP100 4 (A) ON state Immediately after turning on F1 > F2: See figure e.
E = mV 2 1 Formula (1) : Kinetic energy : Load mass : Speed Figure 1. Linear motion E m V Rotary actuator I = mr m: Mass (kg) (However, the weight of the L section is ignored) E= I Formula (2) 2 1 = mr 2 1 This indicates the moment of inertia with respect to the rotation axis of a mass "m" which is a distance "r" from the rotational axis.
EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12
AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.
8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.
Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !
1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !
(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.
Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.
Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange
Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)
2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !