VFA3000 3 x , 18 14 VZA (P , A, B port) VFA VFRA 2 x 4.3 VA (Mounting hole for manifold) 2 x 4.2 (Mounting hole) 2 x 18 (Pilot port) 2 x M5 x 0.8 (Breathing port) 2 x 18 (R1, R2 port) 1765 Series VFA3000 Dimensions: Base Mounted 2 position single: VFA3140-02 03 2 position double: VFA3240-02 03 2 x 4.3 2 x 4.3 (Mounting hole) (Mounting hole) 2 x 18 (Pilot port) (Pilot port) Max. 3 Max. 3 3 (Breathing
Operation LED Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. (4) Press and hold the S button for 2 seconds or longer to complete the OUT setting. (If the button is pressed for less than 2 seconds, the setting will be returned to P.)
() 200 ms() 1.5 s() 0.5F.S. 1 digit 3+1/2 7 2 (/)5 /1s OUT1ON ()OUT2ON () IP40 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) 0.5%F.S.(25 ) 5P 4P PBTPBT 30 g() CEUL/CSA 12 5 2 -32No.IZ*-OMU0031 (ZS-28-A) 2 0.2 mm 0.58 mm 1.12 mm 4.1 -33No.IZ*-OMU0031 0.56 mm R R2 2 (n ) <> <> 31Xn +3.5X(n -1) 31Xn +3.5X(n -1) -34No.IZ*-OMU0031 Revision history A 4-14-1, Sotokanda
Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
In principle, this function counts each time there is a rise or fall in either of the A or B phase pulses. 2 1 Amplification/ Interpolation circuit Counter A phase B phase Magnetic resistance element Piston rod Magnet Count 1 2 3 4 5 6 7 8 9 10 .
Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. SET button Press this button to change the mode and to set a value.
L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD
A Pin no. Wire colour [oU2] Output mode (OUT2) [HYS] Hysteresis mode 1 Brown (DC+) After maintenance is complete, perform appropriate functional inspections and leak tests. Stop operation if the equipment does not function properly or there is a leakage of fluid. [2ot ] Reversed output (OUT2) [2_n] Normal output [F 2] System error 2 NC System error.
This is a legacy product, and replaced byPF2M721W-C8-CW, 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 65 lb
Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 65 lb
The bypass structure limits the contact of moist air with the sensor, reducing degradation of the sensor and helps maintain accuracy. 2-color display improves visibility , Helps promote energy savings , Response time can be set based on application , Integrated flow adjustment valve , Compact and space saving , Expanded flow range, 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH
The bypass structure limits the contact of moist air with the sensor, reducing degradation of the sensor and helps maintain accuracy. 2-color display improves visibility , Helps promote energy savings , Response time can be set based on application , Integrated flow adjustment valve , Compact and space saving , Expanded flow range, 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH
The bypass structure limits the contact of moist air with the sensor, reducing degradation of the sensor and helps maintain accuracy. 2-color display improves visibility , Helps promote energy savings , Response time can be set based on application , Integrated flow adjustment valve , Compact and space saving , Expanded flow range, 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH
The bypass structure limits the contact of moist air with the sensor, reducing degradation of the sensor and helps maintain accuracy. 2-color display improves visibility , Helps promote energy savings , Response time can be set based on application , Integrated flow adjustment valve , Compact and space saving , Expanded flow range, 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH
The bypass structure limits the contact of moist air with the sensor, reducing degradation of the sensor and helps maintain accuracy. 2-color display improves visibility , Helps promote energy savings , Response time can be set based on application , Integrated flow adjustment valve , Compact and space saving , Expanded flow range, 2-COLOR DISPLAY DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH
2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part
EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.
2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.