Type: Standard, Filtered Matter: Dust, Inlet Side Connection Type: One-Touch Pipe (Inch Size), Filtration Level: 30μm, Filter Replacement: Acceptable, Application: [Vacuum Line] Vacuum Line, Connection Tube Inlet Diameter (mm): -, Connection Tube Inlet Diameter (in): 3/16", Recommended flow rate(L/min (ANR)): 20

Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 3/16, Body Size: M5 Standard

Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 3/16, Body Size: 1/8 Standard

Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 3/16, Body Size: 1/4 Standard

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: [PBT Resin] PBT, Application: Standard/Mini, Shape: [Others] Sputtering Cover, Applicable Fitting Size (mm): -, Applicable tube fitting size (inches): 3/16

CUJ

Without auto switch 4, 6, 8, 10 Bore size (mm) M3 x 0.5 6 Port size Stroke (mm) 8 or more AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Note) Only applicable to the mounting position shown in Figure 1 below. Figure 1 Mounting position 1 Mounting position 2 a) Side mount b) Front mount Mounting position 3 Mounting position 4 Notes) 1.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

AMR3000 to 6000

06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

Ozone Resistant

420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000

GA342

1 3 Port Air Operated Valve Series VGA342 How to Order SA 04 VGA342 A VA Port size Passage A Normally closed (N.C.) B Normally open (N.O.) Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O.

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in12R 1/2AS4201FG-04-12AS4211FG-04-12AS4301FG-04-12AS4311FG-04-12

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

Electro-pneumatic Proportional Valve Series VEF/VEP 1

06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8 Rc 1/2 Rc 3/4 4 1 14-9-11 2 Series VEF/VEP Application Example How to Use DIN Terminal Caution Controlling

VXA21/22

only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible. 17-3-96 5 The VX series will be revised shortly.

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

VXA21/22

Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration. Options V Standard For vacuum, non-leak Select an option symbol with the "Applicable Fluid Check List" p.4.0-12 for a special fluid outside of standard.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection A10 A14 Symbol B5 M5 x 0.8 Female thread Pad type Vacuum entry B01 Rc 1/8 F Ball joint type 04 4 tube One-touch fitting 06 6 tube 08 8 tube Material N NBR S Silicon rubber Buffer stroke U Urethane rubber Symbol Stroke Pad dia.