0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)220190 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25 Piston Note 3) speed H (High speed/ High frequency type) 5 to 3000 mm/s (Refer to page 20.) 250 cm3/min or less 300 cm3/min or less 150 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 1000 cm3/min or less 1200 cm3/min or less 800 cm3/min or less Supply pressure 0.3 MPa 2500 cm3/min or less 3000 cm3/min or less 1500 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when
J J5.O 4.1 1 . 9 0.9 0.5 81.8 37.8 18.9 9.4 80 1000 500 250 't25 (e7.6) 48.8 85 42.5 (s4.3) 47.1 69.7 34.8 82.8 41 .4 49.6 24.8 65.7 32.8 3.9 2 1 0.5 74.1 ov 19.5 9.8 100 'r600 4 2 1 0.5 79.9 40 20 1 0 800 400 200 CU (87) 43.5 (vo.c, 48.3 71 .4 35.7 84.4 42.2 50.8 25.4 67.3 itJ.o Table 6.16 Load Ratios for 5 bar working pressure and triction coefticients of 0.01 and 0.2 P N E U A T T c T
Operating direction Operating pressure (MPa) 0.7 220 185 344 288 563 454 0.3 94.2 79.2 147 124 241 207 0.5 157 132 246 206 402 346 OUT IN OUT IN OUT IN 20 Allowable kinetic energy 25 Refer to "Selection" on page 19 regarding allowable kinetic energy. 32 Weights Basic weight Additional weight Unit: g Unit: g Bore size (mm) Standard stroke (mm) Magnet 5 6 11 Bore size (mm) 20 25 32 90 340 527 800
108 101 94 37 63 181 43 57 70 12 oz 1.76 5.22 4.02 3.81 3.56 3.32 1.31 2.22 6.38 1.52 2.01 2.47 g 66 188 146 137 129 121 48 83 231 57 74 92 16 oz 2.33 6.63 5.15 4.83 4.55 4.27 1.69 2.93 8.15 2.01 2.61 3.25 g 119 311 208 632 195 182 170 503 439 567 93 144 375 106 132 157 20 oz 4.20 10.97 7.34 22.29 6.88 6.42 6.00 17.74 15.49 20.00 3.28 5.08 13.23 3.74 4.66 5.54 g 166 406 277 1116 958 800
switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800
Piston B switching pressure (OpenClosed) 0.5 Secondary pressure MPa 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Primary pressure MPa Needle valve flow characteristics Symbol Conditions: Primary pressure 0.5MPa 1800 2000 AV5000 1600 2 1(P) 2(A) 1400 Air flow l/min (ANR) AV4000 1 1200 1000 3(R) 800 AV3000 600 AV2000 400 Accessories/Pressure gauge 200 0 Pressure