Table of Contents

Note) D1: Max. diameter 18.5 20.6 29 21 19.2 18.5 KQ2ZT10-04S 30.5 81.5 73.5 KQ2ZT12-02S 28.5 86 80 12 KQ2ZT12-03S 29.5 87 80.5 26 20.9 25.2 32 22 21.6 20.9 KQ2ZT12-04S 32.5 90 82 Union Elbow: KQ2L Applicable tubing O.D.

ITV

Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Igm: Leakage current of the servo motor (Found from table 11.2.) 120 Leakage current [mA] 100 80 60 40 20 0 2 5.5 14 38100 3.5 8 22 60150 30 80 Cable size [mm ] 2 Fig. 11.7 Example of leakage current per km (lg1, lg2) for CV cable run in metal conduit 11 30 11.

ZQ-OM01401

25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 3.8 2.6 1.3 0.3 0.1 3.8 2.6 1.3 0.3 0.1 80 80 1.9 1.3 0.7 0.2 0.4 1.9 1.3 0.7 0.2

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 5.1 2.6 1.3 0.3 0.1 40 2.6 5.1 1.3 0.3 0.1 80 2.6 1.3 0.7 0.2 0.1 80 1.3 2.6 0.7 0.2 0.1

Fluoropolymer Piping Equipment

Withstand Pressure and Heat Resistance Performance 4.0 3.5 3.0 Pressure (MPa) 2.5 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4, 6 tubing 3/8", 10 tubing 1/2", 12 tubing 3/4", 19, 1" tubing Piping Caution 1. Connect tubing with special tools 2.

Modular F.R.L. Units

P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for all equipment!

Series AK1000

0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

CQM

40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50

PFxx-OMX0002

NPN output type PF3A7##H-##-L#-## Maximum load current: 80 mA Internal voltage drop 1.5 V max. : The output type (NPN or PNP) can be set using [F 0]. -20No.PF-OMX0002-B NPN + Analogue output type PF3A7##H-##-L3/L4#-## Maximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop 1.5 V max.

PFxx-OMY0005

(Displays 0 when the value is below 30 L/min) 80 to 2100 L/min 40 to 1050 L/min (Displays 0 when the value is below 80 L/min) 4.0 0 to 4%F.S. (Displays 0 when the value is below 40 L/min) 100 to 2100 L/min 50 to 1050 L/min (Displays 0 when the value is below 100 L/min) 5.0 0 to 5%F.S.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

MRQ

Reed switch: D-A7/A8, Series MRQ Linear motion part size Solid state switch: D-F7/J7 Output of rotating part (at 0.5MPa) Linear motion stroke (mm) Rotation angle 5 10 15 20 25 30 40 50 75 100 80 to 100 170 to 190 32 1.02N/m An air cushion is also available. 80 to 100 170 to 190 40 1.91N/m Application examples A connecting port can be selected from two positions that are available on the rotation

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 7.0 18.5 18.5 30.0 0.65 0.65 0.65 0.65 REBH15 REBH25 REBHT25 REBHT32 25 30 30 30 REBH15 REBH25 REBHT25 REBHT32 10-2-80 80 Sine Rodless Cylinder High Precision Guide Type Series REBH Stroke Adjustment The adjusting bolt is adjusted to the optimum position for smooth acceleration and deceleration

OMR0032

: 5 (1.25 10-3) = 4000 [pulses] Travel speed: 20 (1.25 10-3) = 16000 [pulses/s] Acceleration time: 20 80 = 250 [ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.

Shock Absorbers and Rate Controls

500 12.5 20.0 ;00 l7 LR0Eltttl.l5rl ,63 1.00 3-80 1,700 670,000 2,500 12.5 20_0 /50 l 7 0tl{l l.l5x2 .63 2.00 t 2,130 3,400 875,000 2.500 7.0 20.0 500 25 LR0tl{ll.l5x2 .63 2.00 3-80 3,400 875,000 2,500 7.0 20.0 750 1.5 0tlll1.25x I .0J t.00 t2-r30 1,i00 808,000 2,500 12. 20.0 i00 20 LROtlill,25xl .63 1.00 3-80 1,700 808,000 2,500 12.5 20.0 750 20 0tlf,1,25x2 .63 2.00 l2-130 3,400 986,000

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw