Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Thermo-chiller

Product side 7 3 Facility water outlet (For water-cooled refrigeration) Facility water equipment 7 3 3 Facility water inlet (For water-cooled refrigeration) 8 5 Customer system side 3 Circulating fluid return port 3 3 4 Oscillator 7 Circulating fluid outlet 1 6 4 CH1 7 2 Optical system 4 CH2 10 Automatic fluid fill port (For automatic fluid fill set) Fluid supply 9 Overflow port (For automatic

JXCx-OMT0062

SV.00 (1) (4) (10) (9) (5) (6) ARX830007 3 (7) Label of Controller version Example) SV2.07-1.00 (8) (11) A Side No.

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS AS12l1FG-M5 AS13l1FG-M5 M5 x 0.8 Gasket seal Note 3) AS-FE AS12l1FG-U10/32 AS13l1FG-U10/32 10-32UNF Note 3) KE AS22l1FG-l01 AS23l1FG-l01 1/8 Note 3) AS22l1FG-l02 AS23l1FG-l02 1/4 Note 3) Note 3) AS-FG AS-FG R NPT Note 1) Sealant AS32l1FG-l02 AS33l1FG-l02

VQ7-6/7-8

Other Nil 1 2 3 4 9 ... ... 10 10 stations Note) When equipped with control unit, 1 or 2 stations are used for mounting.

HRX-OM-W038

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-W038 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

SFOD-OMT0010

Product Outline . 7 2.1 Features . 7 2.2 How to Order . 8 2.3 Product configuration . 9 3. Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2.

Environment

3 !

Series VQ Metal Seal/Rubber Seal Body Ported

AXT661-14AN-10 3 pcs. Example) Lead wire length 1000mm VQ1170-5LO-C63 pcs. AXT661-14A-10 3 pcs. Example) Lead wire length 1000mm Connector ass'y No. (DC) Connector ass'y No. Double No. Double No. Lead wire length Single/3 position No. AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Type 2 3 Elbow Universal Applicable tubing O.D. Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

3 Port Air Operated Valve Series SYJA300

: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A, R port) M5 x 0.8 23 5-4-5 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With

CUJ

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Operating piston speed (m/s) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 Allowable kinetic energy (J) 10 6 8 10 1 Load weight kg 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 22 Series CUJ Specific Product Precautions

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

300 103.5 23.4Mounting holes (Lead wire length) 47.5 18 7.2 7.2 SY 3 R3 2 4 SYJ 22 10 SMC SMC 5 1 3 Manual override Cover diameter 1.6 Cross section 0.34mm2 SX 42 36 3 VK VZ VF M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) VFR VP7 46.5 VP4 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE

VCC

Cleaning valve with gate valve Mountable number In this case, four (4) cleaning valves (including gate valve) 2 port valve Mountable number In this case, six (6) 2 port valves 3 port valve Mountable number In this case, ten (10) 3 port valves Stations 2 1 1 3 5 1 3 5 7 9 Pilot port fitting IN port OUT port D side U side IN port RETURN port Stations 3 Gate 2 4 6 2 4 8 6 10 Cleaning unit

SMC Wireless System PROFINET compatible

ms or less (the input connected to the base) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s (the input connected to the remote) 3 Analogue input/output 10 ms or less (the output connected to the base) Input/Output specifications DA refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s (the output connected to the remote) 3 Output type Source/PNP (-COM) Sink/NPN (+COM) Number of outputs Max. 32 points

HRL

Maximum load current 800 mA AC/DC or less1 Contact output signal 1, 2, 3, 4, 5, 6 Minimum load current 5 VDC 10 mA Output voltage range 0 to +10 V Analog output signal 1, 2 Maximum output current 10 mA Output accuracy 0.4% F.S. or less Output voltage 24 VDC 10% 200 mA MAX1 (No inductive load) When using this products power supply, connect pin 1 to pin 2 and the COM side of each contact input

HEC_W-E

-8-8 8.6.3 SETTING MODE, LEVEL 3 -8-10 9 ALARM -9-1 9.1 HOW TO IDENTIFY ALARM -9-1 9.2 ALARM INDICATION -9-2 9.3 HOW TO RESET ALARM -9-3 9.4 ALARM CODE LIST-9-3 9.5 TROUBLESHOOTING -9-5 10 APPENDIX -10-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.

Fieldbus system EtherNet/IP TM compatible SI Unit

method. 10 HDX 11 BUS OUT port setting Unit 10 FDX 100 HDX 1: This function is valid only when "Hold/Clear priority" of the system parameter is set to "Via software". 2: Some PLC does not support an idle mode. 3: The count is memorized every hour.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17