Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Out; 4-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Outlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet 4: V3 [-30 in.Hg to 30

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Out; 4-Gauge Port Out)], Connections, Inlet: 8 (NPT 1/2 Inch), Connections, Outlet: 8 (NPT 1/2 Inch), Gauge Port, Outlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet 4: V3 [-30 in.Hg to 30

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Out; 4-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Outlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet 4: V3 [-30 in.Hg to 30

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 3P [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Outlet 3: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Outlet 4: No Gauge Port, Pressure Gauge Unit: psig/bar

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 3P [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: 8 (NPT 1/2 Inch), Connections, Outlet: 8 (NPT 1/2 Inch), Gauge Port, Outlet 3: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Outlet 4: No Gauge Port, Pressure Gauge Unit: psig/bar

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Gauge Port, Outlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet 4: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge)

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to

Operating Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: B (Body: Brass; Nozzle: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port In, 4-Gauge Port In)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Inlet 3: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet 4: V3 [-30 in.Hg to 30 psig (-0.1 to

: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

Port, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge

: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge

IZx-OMV0005

Wiring of the power supply cable Fix the cables with more than the minimum bending radius to prevent an excessive stress from being applied to the cables and/or connectors. 9 1 Minimum bending radius : 30 (mm) Note) This is an allowable bend radius at 20oC. When the cables are bent at a lower temperature than 20oC, it may cause unreasonable force to be applied to the connectors.

SI unit for DeviceNet TM

of Specifications 30 Dimensions 32 -1No.EX-OMO0004-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Clean Air Module

setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C) Temperature characteristics NPN or PNP open collector output Maximum load current 80 mA Switch output Maximum applied voltage 30