Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

High Speed 2 Port Valve

Wiring 1. Polarity. 1. Leakage voltage When a resistor and a switching element are used in parallel or C-R device (surge voltage suppressor) is used for the protection of the switching device, note that leakage voltage will increase because earth leakage current passes through the resistor and C-R device. The suppressor residual leakage voltage should be 0.2 VDC or less.

VP3145-OMM0003

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP3145-OMM0003 VP31*5 / 1 1.5 *3) *3) 1 1 3 VP3145-OMM0003 VP31 5 3 / / () C-R C-R ( ) DC 5% AC 15% (ON)(OFF) 0.1 0oC 0.2Mpa (INOUT ) 4 VP3145-OMM0003 VP31 5 3 / ( ) 9 ) 1 ()ISO VG32 2 ()ISO VG32 5m Nm Rc 3/8 2224 Rc 1/2 2830 Rc 3/4 2830 Rc 1 3638 Rc 11/4 4042

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

HEC-OM-Y008

OUT3 OUT4 1 or 2 1: 1 bit, 2: 2 bit Temp.control Turn ON Main power switch again of the piping (e.g. no tight bends or crushed pipes). Normal pump and fan : Temperature control Control Mode status RYD 4) Confirm there is no abnormal sound, smell or heating from the product. 2nd digit : Parity check stop and pump/fan operation enabled Setting DI2 Sets control mode.

VER2000/4000

1 !2 !3 !4 !5 !6 q w e r t y u i Block packing !

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Meter-out Meter-in 0 1 Note) M3 and M5 sizes: s (with seal) is not necessary. Thread type Cylinder side R Tube side Rc Symbol Bore size Made to Order (For details, refer to page 647.)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

1 !

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

3 Port Valve with Locking Holes Series VHS Specifications Model VHS20 VHS30 VHS40 VHS40-06 VHS50 3/4 1 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 IN, OUT Piping port 1/8 1/2 1/2 1/4 3/8 EXH 4.17 IN OUT 0.54 0.76 1.46 2.06 2.98 4.44 6.78 0.87 1.68 Cv OUT EXH 0.60 0.87 1.75 2.08 2.12 2.85 2.93 2.12 0.76 1.57 Air Fluid 1.5MPa Proof pressure 0.1 to 1.0MPa Operating pressure range JIS Symbol -5 to 60C

VEX1

O-rings cannot be shipped as a single unit. 4 1 PVQ 8 3 3 A B 2 1 Body ported Base mounted 2 1 VY1 4 3 5 VBA VBAT 1 1 2 1 1 4 1 7 1 4 1 AP100 1 2 9 2 Without sub-plate 8 1 2 4 1 Option (2) Part no.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

VEX5

Model Basic type Select type Port size Model Air operated External pilot solenoid Port 1 (P), 2 (A) Air operated External pilot solenoid Port 3 (R) , , 1 1 2 3 4 , , 1 1 2 3 4 VEX5500 1, 1 VEX5700 1 4 1 , 2 VEX5900 VEX5510 VEX5710 VEX5910 VEX5511 VEX5711 VEX5911 1 2 11 4 2 VEX5501 VEX5701 VEX5901 Economy valve VEX VEX 2445