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Speed control needle seal 2 15 Sub plate 1 33 Valve port gasket 4 16 Pipe fitting 1 34 Solenoid valve 1 17 Valve port 2 35 Rod end nut 1 18 Check spring 2 36 Magnet (1) 22 Revision history A : Addition of allowable kinetic energy when using rubber cushion Jan.24.2017 B : Voltage change due to discontinuation of some specifications of VS series Jul.9.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Revision B: Complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved

Pilot port position for pilot valve 18 Revision history A:Create New 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 19

If the product malfunctions, please return the valve as it is. 11 No.VEX-OMA0019-C Revision history AE ARenewal Ny A BE ASafety Instructions Po A CE ARenewal WU 1st printing : January 1987 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

If the product has failed, then please return the valve as it is. 11 VT317-OMH0001-B Revision history AE ASafety Instructions Po A BE ARenewal Wo 1st printing :MX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

[January 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. DeviceNetTM is a trademark of ODVA. 2012-2021 SMC Corporation All Rights Reserved No.EX-OME0015-F

G : Oct. 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

. -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Bad characteristic Plugged restrictor Disassemble and clean Deformed diaphragm Replace diaphragm -9- No.IL01-OM06-C -10- No.IL01-OM06-C -11- No.IL01-OM06-C Safety instructions update Drawings update Spare parts list, Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject

Spare Parts List 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 29063#1 Valve NBR 1 JIS B 2401, P3 O ring NBR 2 JIS B 2401, P7 O ring NBR 1 JIS B 2401, P10 O ring NBR 1 JIS B 2401, P34 O ring NBR 1 -9- #1 -9-10-10- Revision A Format change and content review B Drawing update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

. * If the product has failed, then please return the valve as it is. 12 No.VT325-OMK0002-B Revision history AE A Renewal PS A BE A Renewal WQ 1st printing: KS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Leakage due to deterioration of rubber parts Consult SMC. 9 -13- -14- Revision history A Thread type (NPT,G) addition B Format change and content review C Sectional view filter deletion of P.5 D Name plate layout change E Content review F P.5 Sectional view change 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

When it is necessary to disassemble, please contact the SMC Sales representative. 18 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 19 -

SYJ500*-OMJ0001-A -- Revision history A Safety Instructions oP 1st printing : Jy 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.SYJ500-OMJ0001-A

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherCAT is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.EX-OMO0030-E

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.EX-OMP0005-I

[July 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2006-2022 SMC Corporation All Rights Reserved No.D-S-OMB0023-C

[February 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013-2019 SMC Corporation All Rights Reserved No.EX-OMH0025-C