SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

Precision Clean Regulator

Parts cleaning All wetted parts degrease washing Note) At set pressure of 0.2 MPa 871 SRP Series Flow Rate Characteristics (Representative value) Fluid: Air SRP1101-M5 Conditions/Inlet pressure: 0.5 MPa SRP1-M5 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50 60

MXW

Port thread type 8 to 16 M thread Rc NPT G Nil Number of auto switches Nil TN TF 20, 25 2 pcs. 1 pc. n pcs.

Centering Unit MACM Series

mm (MACM2) 20 20 mm (MACM4) 30 30 mm (MACM6) 50 50 mm (MACM10) Nil Unsupported P Port side photo sensor mounted type B Port back side photo sensor mounted type Specications Precautions Model MACM2-12 MACM4-20 MACM6-30 MACM10-50 Max. allowable load weight lbf [KN] 450 [2] 900 [4] 1350 [6] 2250 [10] Be sure to read this before handling the products.

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 2 1.6 20 3 25 3 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 3 4.5 35 4 50 4 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?