Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

Mechanical Valves Series NVM, NVFM, NVZNI

4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6

IIIIIII

4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6

A

14" 139 63 10 NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

ISE70/75/75H

1 2-color Display Digital Pressure Switch Series ISE70/75/75H ZSE ISE PSE Metal Body Type Metal Body Type Metal Body Type (Die-cast aluminum) Z I SE3 10 MPa 15 MPa 10 MPa 15 MPa 1 MPa 1 MPa For General Fluids For General Fluids PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Function Details K Copy function (F97) (Z/ISE20A, 20B, 20C series only) The settings of the master sensor can be copied to the slave sensors, reducing setting labor and minimizing the risk of setting mistakes. The set value can be copied to up to 10 switches simultaneously.

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01-X30 AN20-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model ITVH Description ITVX Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01-X30 AN30-N03 ANA1-N03

PSE540/560

, for 2 hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case: C3604 + nickel

PSxx-OMM0002CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 9 / / 10 () 11 /5 m / 12 10~15 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -47No.PS-OMM0002CN-F No. 14 15 16 () 17 () ( ) () / -48No.PS-OMM0002CN-F 80mA 10 1 1dight 1 -49No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() -0.11MPa -0.12MPa 0-101kPa -100100kPa -0.1051.1MPa -0.1052.2MPa 10-111kPa -110110kPa 2 MPa 4 MPa 500 kPa 0.001 MPa

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

PSxx-OMV0008CN

No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

PSxx-OMV0003CN

-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

(N, E) ALT-5 (N, E) ALT-5-IS-1, 2 (N, E) ALT-9 (N, E) ALT-9-IS-1, 2 Material Qty. y G46-10-02(Nil, E) G46-P10-N02(N) 12374AP Pressure gauge 4 1 NBR Cam handle assembly Seal 5 6 7 8 1 2 1 1 12377 12384 Siphon tube assembly Float switch 123712A IS410-1, 2 IS410-1, 2 1049 ALF400 to 900, ALT-5/-9 Series Dimensions: Auto Feed Lube ALF400 ALF800/900 Port size Port size D ALF500/600 Port size