CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

V

The minimum quantity to order is 10 pieces.

Process Pump <Fluororesin Type> Series PA3000

) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot

PAB-OM-O003

Handling Precautions . 10 5. Names and functions of parts . 10 6. How to use . 11 7. Specification and how to order . 12 8. Discharge capability . 14 9. Troubleshooting . 16 10. Outer dimensions. 18 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

IZ-OMK0015

DC power supply Black DC2(-) (Power supply 0V) Black DC2(-) (Power supply 0V) 24V DC +/-10% 0V 0V Blue DC1(-) (F.G.)

Process Pump

Handling Precautions. 10 5. Names and functions of parts.11 6. How to use.11 7. Specification and how to order. 13 8. Discharge capability . 15 9. Troubleshooting. 17 10. Outer dimensions . 19 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

AXTS-OMY0007

Internal pilot: 1 to 5HZ and external pilot: 1 to 8Hz is reference. The charts on page 10 show the relation for the adjustment needle value and operation frequency. However, there is approx. 2Hz of variation depending on individuality. Operating conditions affect the operating frequency.

Table of Contents

-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Single AXT66114A Lead wire length 300mm 600mm 1000mm 2000mm 3000mm VQZ1000 VQZ1000-GS-5 VK AXT66113A Latching VQZ2000 VQZ2000-GS-5 6 10 20 30 DC (-COM) VQZ3000 VQZ3000-GS-5 VZ AXT66113AN Latching Note ) Above part number consists of 10 units. Each unit has one gasket and two screws. Orders are accepted in 10 units.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

IZx-OMX0087

10 G 1 K 5 Straight 15 15 H 2 M 10 Straight N None J 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

VJ10-36-1A-10 . 2 pcs.

Multistage Ejector (N)ZL Series

10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction

XSA Series

(Dispersion: +/-10%) Note 7) Value when the ambient temperature is 20oC at rated voltage. The value depends on the ambient environment. This is for reference.

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.