Table of Contents

4.3 8 4.5 M5 x 0.8 15 10 19 53 37 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 12.5 10.5 25 53.5 37.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30 st or less Over 30 st to 100 st Over 300 st 30 st or less Over 30 st to 100 st 23 Over 100 st to 200 st 200 Over 200 st

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread depth 6.5 8-M4 x 0.7 thread depth 5.5 8-M5 x 0.8 thread depth 7.5 8-M5 x 0.8 thread depth 7.5 2-M6 x 1.0 thread depth 10 2-M8 x 1.25 thread depth 12 2-M8 x 1.25 thread depth 12 M6 x 1.0 x 12l M8 x 1.25 x 6l CXS20 8 7.75 9.5 6.5 12.5 M6 x 1.0 45 M6 x 1.0 x 14l M8 x 1.25 x 6l CXS25 8.5 13 9 9 15 M6 x 1.0

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

LX

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Compact Cylinder

1.0 52 10 10 5 5.5 15 M5 x 0.8 5 to 50 0.043 M5 x 0.8 5 53.5 39.5 32 34 12.5 M8 x 1.25 21.5 49.5 13 16 45 2 4.5 14 14 7 14 0 0.052 5.5 21 10 to 50 1/8 63.5 49.5 75, 100 For details about the rod end nut and accessory brackets, refer to page 19.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

1

T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

NCQ2/CQ2

8 43 34 9.5 M5 x 0.8 7 10 #10-32UNF 4.5 13 0 0.043 M5 x 0.8 M5 x 0.8 25 5 to 50 19 5.5 28 40 2 10 52 10 10 1/4-28UNF 47 37 11 5 12 12 M6 x 1.0 15 0 0.043 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 M5 x 0.8 13.3 5/16-24UNF 39.5 53.5 32 10 to 50 21.5 34 5.5 45 2 4.5 60 14 14 12.5 13 16 M8 x 1.25 7 14 49.5 21 NPT 1/8 0 0.052 RC 1/8 Note 1) 63.5 49.5 75, 100 For details about the rod end nut and accessory

Smooth Cylinder/Low Speed Cylinder

8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1296 Clean Series Low Speed Cylinder Series 10-, 11-CM2X 10-,11CM2X Series How to Order Clean Series 10 11 Relief type

Dual Rod Cylinder Series CXSJ/CXS

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

smcmaintenancepartslist

M3 x 0.5 x L M2.5 x 0.45 x 6L M5 x 0.8 x L M3 x 0.5 x 10L M5 x 0.8 x L M4 x 0.7 x 10L M5 x 0.8 x L Without auto switch 12 With auto switch Without auto switch 16 With auto switch Without auto switch 20 With auto switch Without auto switch 25 With auto switch 32 40 50 63 M4 x 0.7 x 4L Truncated cone point M4 x 0.7 x 6L Truncated cone point M4 x 0.7 x 6L Truncated cone point L: Length of

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

JXCx-OMT0023

] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.

Air Slide Table

M5 x 0.8 4.4 4 9 MXQ12B M6 x 1 7.4 7 12 MXQ16B M6 x 1 7.4 10 15 MXQ20B M8 x 1.25 18 14 20 MXQ8C M4 x 0.7 2.1 6 9 MXQ12C M5 x 0.8 4.4 8 12 3.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, D-A44C-10 69 77 91 107 121 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 6.5 6.5 7.5 9.5 9.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening