CXS

32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 8-28-8 8 Model Selection Series CXS Graph (7) Up to 50 mm stroke V = Up to 800mm/s 0.2 0.1 Weight m (kg) MX 0.05 MTS 0.04 0.03 MY CXSJM6 0.02 CY CXSJL6 MG 20 40 0.01 CX 60 0 Overhang L (mm) DCXSJM CXSJL Graph (11) V = Over 400 mm/s; Up to 30 mm stroke CXSJM CXSJL Graph (10)

CXS

20 40 0.01 CX 60 0 Overhang L (mm) DCXSJM CXSJL Graph (11) V = Over 400 mm/s; Up to 30 mm stroke CXSJM CXSJL Graph (10) V = Up to 400 mm/s; Up to 30 mm stroke -X 201 1 Data Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph (15) V = Over 400 mm/s; Up to 100 mm stroke CXSJM CXSJL

Compact Type

Type Dual-Rod Cylinder Series CXSJ Graph up to 50 mm stroke 7 V = up to 800mm/s 0.2 0.1 Weight m (kg) 0.05 0.04 0.03 CXSJM6 0.02 CXSJL6 20 40 0.01 60 0 Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 30 mm stroke 10 11 CXSJM CXSJL Graph V = up to 400 mm/s; up to 30 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20

Compact Type Dual-Rod Cylinder Series CXSJ

Type Dual-Rod Cylinder Series CXSJ Graph up to 50 mm stroke 7 V = up to 800mm/s 0.2 0.1 Weight m (kg) 0.05 0.04 0.03 CXSJM6 0.02 CXSJL6 20 40 0.01 60 0 Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 30 mm stroke 10 11 CXSJM CXSJL Graph V = up to 400 mm/s; up to 30 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

02-cxsj-e

CXSJL6-PS CXSJL6 CXSJL10 CXSJL15 CXSJL20 CXSJL25 CXSJL32 CXSJL6-PS CXSJL10-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS !7 !8 !9 Set of left nos. !7, !8, !9 Piston seal CXSJL10-PS Rod seal NBR CXSL15A-PS O-ring CXSL20A-PS CXSL25A-PS CXSL32A-PS Seal kit includes !7, !8, and !9. Order the seal kit, based on each bore size.

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 20mm

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Specification: 11 (Clean Series, Vacuum Suction), Bearing: M (Slide Bearing), Bore Size: 10mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Specification: 11 (Clean Series, Vacuum Suction), Bearing: M (Slide Bearing), Bore Size: 6mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Specification: Clean Series, Vacuum Suction, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 pc.

Specification: Clean Series, Vacuum Suction, Bearing: Slide Bearing, Bore Size: 10mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 pc.

Specification: Clean Series, Vacuum Suction, Bearing: Slide Bearing, Bore Size: 6mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 pc.