Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

29.1 22.5 R2 R1 P 13 5 10 10 5-M5 X 0.8 28 (Piping port) [ ] for AC M plug connector (M): SYJ3240-lMll-M5 L plug connector (L): SYJ3240-lLll-M5 37 37 2-3.2 (Mounting holes) 2-3.2 (Mounting holes) 22 22 2.5 2.5 B A B A 11 11 17.5 17.5 A B A B 14 14 (Lead wire length) 71.4 300 98.6 79.4 [82] (Lead wire length) 300 52.6 [59.1] 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3243-L-M5 M8 connector (WO): 10-SYJ3243-WO-M5 M plug connector (M): 10-SYJ3243-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 M8 x 1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6 [103] R1 P R2 R1 P R2 R1 P R2 79 [83.4] 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to page 375 for dimensions with connector

SYJ3000/5000/7000

28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

VQZ1000/2000/3000

62> Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 5 R1 P 1 R2 3 < >: AC 87.5 M plug connector (M) 80 61.5 Cover diameter 1.5 Cross section 0.23 mm2 1 P 300 (Lead wire length) 145 (3 position) R1 R2 5 3 132 (Double) 102.5 (Single) 77 66 Indicator light 63.5 <68.5> 5 R1 P 1 R2 3 < >: AC Formula L1 = 19n + 11, L2 = 19n + 23 n: Stations (Maximum 20

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (Mounting hole) 17.5 14 28 L plug connector (L): 10-SYJ3143-L-M5 M8 Connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 64.3[66.5] 54.5[56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

0.4

) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) r VQ1C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component Parts No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire length) 300 300 120.5<122.5> 108<110> (Lead wire length) 60<61> 54<55> Indicator light 49<52.5> 54<59> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23mm2 < >: AC <

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

) 75 Pg.7 58 <61.5> Applicable cord O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23mm2 1 P < >: AC R1 R2 5 3 87.5 M plug connector (M) 80 61.5 143.5(3 Position) <145.5> 130 (Double) <132> (Lead wire length) 101.5 (Single) <102.5> 1 P R1 R2 5 3 65 <66> 63.5 <68.5> 300 77 Cover diameter 1.5 Cross section 0.23mm2 Indicator light 1 P < >: AC R1 R2 5 3 Equation L1=19n+11 L2

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

P 13 5 10 10 14 14 5-M5 0.8 (Piping port) 15 [ ] for AC L type plug connector (L) : SYJ3140L -M5 M type plug connector (M) : SYJ3140M -M5 33.5 33.5 23.2 (Mounting holes) 22 4 23.2 (Mounting holes) 22 4 B A B A 11 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 About 300 52.6 [59.1] About 300 54.7 [56] (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 38.1 23.3 3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2-2.6

VZS

-FZ-01 132 (3 position: 142) 300 (Lead wire length) 300 (Lead wire length) Other dimensions are the same as the single type.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)