When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

Slider Type Ball Screw Drive/11-LEFS Series

-LEFS Series AC Servo Motor Clean Room Specication Specifications 11-LEFS25, 32, 40 AC Servo Motor Model 11-LEFS25S2 6 11-LEFS32S3 7 11-LEFS40S4 8 Stroke [mm] Note 1) 50 to 600 50 to 800 150 to 1000 Work load [kg] Note 2) Horizontal 20 20 40 45 50 60 Vertical 8 15 10 20 15 30 LEF Up to 400 900 450 1000 500 1000 500 401 to 500 720 360 1000 500 1000 500 501 to 600 540 270 800 400 1000 500 601

15

Lead 20: LEFS40A 35 60 LEC S 30 Lead 20: LEFS40A 50 Work load [kg] Work load [kg] Lead 30: LEFS40H 25 40 LEC SS-T Lead 30: LEFS40H 20 30 15 20 Lead 10: LEFS40B LEC Y 10 10 5 0 0 Motorless Motorless 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Speed [mm/s] Speed [mm/s] LAT LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm

Environment

LEF LEF LEF16 LEF25 LEF32 LEF40 2000 2000 2000 2000 LEJ 1500 1500 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 1000 1000 1000 1000 X LEM 500 500 500 500 LEY 0 0 0 10 20 30 40 50 0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 LEPY LEPS Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm

JXCx-OMU0004

75 1000 500 1000 300 1000 75 1000 9 400 1200 300 1200 100 1200 600 1200 400 1200 100 1200 10 500 1400 400 1400 125 1400 700 1400 500 1400 125 1400 11 600 1600 500 1600 150 1600 780 1600 520 1600 150 1600 12 750 1800 600 1800 175 1800 930 1800 620 1800 175 1800 13 930 2000 620 2000 200 2000 1000 2000 760 2000 200 2000 14 1000 2500 700 2500 225 2500 1140 2500 800 2500 225 2500 15 1200 3000

Programless controller Step motor (servo 24 VDC)

300 1000 200 1000 75 1000 9 100 1200 400 1200 300 1200 100 1200 10 125 1400 500 1400 400 1400 125 1400 11 150 1600 600 1600 500 1600 150 1600 12 175 1800 750 1800 600 1800 175 1800 13 200 2000 930 2000 620 2000 200 2000 14 225 2500 1000 2500 700 2500 225 2500 15 400 3000 1200 3000 800 3000 520 3000 LEFS40H LEFS40A LEFS40B Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: NPN, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEFS40A-800, I/O cable length / communication plug(m): 5, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEFS40A-300, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEFS40A-900, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

Table of Contents

For detailed selection procedures, refer to pages 8-11-38 to 8-11-39. 0.1 0.3 100 200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-36 8-11-37 36 Series MY1M Model Selection Following are the steps for selecting the most suitable Series MY1M to your application.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT . 11-2 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

Table of Contents

22 19.5 17 12 13 11 45 32 26 Data 40 M14 x 1.5 8 10 56.2 7 Up to 1000 24 21 22 14 16 12.5 50 41 32 20, 25 NA NN P S TD TT TX TY TZ Z ZZ N Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 8 10 32 32 52 192 202 20 25 34.5 M26 x 1.5 Up to 700 1/8 146 9 10 40 40 60 196 206 20 42.5 40 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 209 219 22 40 51 M32 x 2 53 Up to 1000 1/4 181 10 11 53 77

MY1

For detailed selection procedures, refer to pages 8-11-38 to 8-11-39. 0.1 0.3 100 200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-36 8-11-37 36 Series MY1M Model Selection Following are the steps for selecting the most suitable Series MY1M to your application.

AC Servo Motor Driver (Network card type ）

OPTIONS AND PERIPHERAL EQUIPMENT 111 to 11-34 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

Table of Contents

1/8 1/8 1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32

JXCx-OMT0023

11 11.