15

LEFS40lll-850 1103.4 856 1028 14 6 900 LEFS40lll-900 1153.4 906 1078 14 6 900 LEFS40lll-950 1203.4 956 1128 16 7 1050 LEFS40lll-1000 1253.4 1006 1178 16 7 1050 LEFS40lll-1100 1353.4 1106 1278 18 8 1200 LEFS40lll-1200 1453.4 1206 1378 18 8 1200 LZ LC3F2 Motor Mounting Dimensions [mm] Motor type FA FB FC FD FE FF NZ/NW M5 x 0.8 8.5 70 50 4.6 11 NY M4 x 0.7 8 70 50 4.6 11 NT M5 x 0.8 8.5 70

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

JXCx-OMU0004

CCW [CCW] 11() 2 22 =() 34 48 11() 3 22 =() 34 48 * 10.

Cylinder with Lock

R1 S5 32 E5032 32 10 11 260.2 0.6 21 18 31 8 38 51 7 10 10 6.6 40 E5040 36 12 11 280.2 0.6 24 22 35 10 41 54 9 10 11 6.6 50 E5050 45 12 15 320.2 0.6 33 30 45 12 50 65 11 12 12 9 63 E5063 50 16 15 400.2 0.6 37 35 50 12 52 67 11 14 15 9 80 E5080 63 16 18 500.2 0.6 47 40 60 14 66 86 12.5 18 15 11 100 E5100 71 20 18 600.2 0.6 55 50 70 15 76 96 13.5 20 19 11 l3 l1 Single clevis with ball joint

Electric Actuator/Slider Type

LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390

Environment

3 e r t r Motor type* Nil Basic type H High precision type Symbol Type Output [W] Actuator size Compatible driver S2 AC servo motor (Incremental encoder) 100 25 LECSA-S1 w Size e Motor mounting position S3 AC servo motor (Incremental encoder) 200 32 LECSA-S3 Nil Top mounting D In-line 25 32 S6 AC servo motor (Absolute encoder) 100 25 LECSB-S5 LECSC-S5 LECSS-S5 S7 AC servo motor (Absolute

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

Profile Design ISO/VDMA Air Cylinder Series CP95

11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

CATALOG

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

A

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

C95

11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 R1 CN CH d3 S5 K1 G2 ER G3 EN G1 K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CLA

'I. 78 2S 52 14 / 113 21 30 72 23 17 M1 2X l .75 _boot With boot PW S W H 12 ... 1 h f zz j IBore olze k U M MM MM (mm) XIUS N P PG PH PL 40 6 71 11 M1 4Xl .5 7/' 6 20 27 'I, 42 11 20 45 153 8 51 215 43 11 .2 59 223 168 0 I50 58 237 52 11.2 66 245 50 7 80 11 M18Xl .5 30 0/, 46 10 21 V.

LEC-OM02904

TAISEI 5. 10mUL 11 23 11 11.6 () 1 (2) (1) AC AC LECSS-S5 30A5A 30A5A 10A LECSS2-S7 30A5A 30A5A 10A 300V S-N10 240V T LECSS1-S7 30A10A 30A10A 15A LECSS2-S8 30A10A 30A5A 15A 1. UL/C-ULK5 2. 80ms 11 24 11 11.7 (1) (a) () SD 1 (3.12) (b) ( ) (c) () 11 25 11 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1.()(FR-BIF-(H)) 2.

LEC-OM02704CN

AED ( () 150 1. 2. ) 10.5 (A37)(A37) 1 Pos Spd Acc Dec Dwl (DWELL) Aux 10 16 11 11 . 2 11.1 . 2 11.2 . 4 11 1 11 11 11.1 (1) LECSC-S5 LECSC-S7 [mm] 40 6 6 6 135 (80) 4 () CNP1 CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BAT MR-J3BAT 0.8[kg] .