2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

Table of Contents

35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange

JXCx-OMU0004

300 1200 100 1200 600 1200 400 1200 100 1200 10 500 1400 400 1400 125 1400 700 1400 500 1400 125 1400 11 600 1600 500 1600 150 1600 780 1600 520 1600 150 1600 12 750 1800 600 1800 175 1800 930 1800 620 1800 175 1800 13 930 2000 620 2000 200 2000 1000 2000 760 2000 200 2000 14 1000 2500 700 2500 225 2500 1140 2500 800 2500 225 2500 15 1200 3000 800 3000 520 3000 1200 3000 1000 3000 300 3000

Table of Contents

Refer to page 8-11-96.

Electric Actuators

SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

CATALOG

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

Battery-less

Work load [kg]2 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200

A

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod side flange style: CG1WFN CJ2 Rod Side Flange Style Stroke range (mm) Bore size (mm) B E F FX FD FT H CM2 20 25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 40 44 53 61 76 92 104 128 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 35 40 40 50 58 58 71 71 CG1 Courtesy

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390

Table of Contents

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

CL

W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 35 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 59 67 73 77 85 112.5 121 133 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 18.5 11 11 11 11

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS40l-550l 906 955 556 728 10 4 600 11-LEFS40l-600l 956 1005 606 778 10 4 600 11-LEFS40l-650l 1006 1055 656 828 12 5 750 11-LEFS40l-700l 1056 1105 706 878 12 5 750 11-LEFS40l-750l 1106 1155 756 928 12 5 750 11-LEFS40l-800l 1156 1205 806 978 14 6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

CL

11 11 11 16 16 18.5 1001 to 1200 1001 to 1200 1001 to 1400 1001 to 1500 1401 to 1600 1401 to 1600 1401 to 1600 67 52 64 78 92 115 128 144 11 11 13 16 78 20 20 25 30 36 36 40 35 35 40 40 50 50 56 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 50 55 65 80 90 90 90 32 32 37 37 47 47 53 7 7 11 11 15 15 17 40 40 52 52 59 59 59 70 86 102 116 145 161 182 18 18 22 26 31

Table of Contents

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Compact

, (1300) (1400), 1500, (1600), (1700) (1800), (1900), 2000 50, 100, 150, 200, 250 300, 350, 400, 450, 500 550, 600, 700, 800, 900 1000, (1100), 1200, (1300) (1400), 1500, (1600), (1700) (1800), (1900), 2000 Stroke [mm] Note 1) Work load [kg] Note 2) Horizontal 6 (10) 11 (20) Speed [mm/s] Note 2) 48 to 1000 (Refer to Table 1 for set values when LECP1 or 2 is selected.)

Table of Contents

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

MY1

Refer to page 8-11-96.

Table of Contents

(Refer to page 14-19-11.)