High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Free Mount Cylinder

5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 7 10 11 12 15.5 19.5 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 13 15 20 26 32 40 7 9 12 16 20 24 22 24 32 40 50 62 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18

Aluminum High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

MHZ

Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed No setting No setting MHZ2-6 1 7.5 6 4 1 3 2 6.5 5 3 2 1 No setting No setting No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting

MHZ

No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting (Normally open) Single acting (Normally closed) 2 4 1 3 2 3 2 1 No setting MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 16 18 12 16 9 14.5 3 11 9.5 MHZJ2-6 No setting No setting MHZJ2-10 No setting No setting MHZJ2-16 3 2

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.) -M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo

Table of Contents

Operating Range Bore size (mm) Auto switch model 32 25 20 16 10 6 7 7 6.5 5.5 3.5 3 5 5 5 3.5 2.5 2.5 D-A9/A9V 14 12.5 11 9 6 5 D-M9/M9V D-F9W/F9WV Since this is a guideline including hysteresis, not meant to be guaranteed. (assuming approximately 30% dispersion.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

H 2.3 12-5-26

XLAQ/XLDQ

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

1

3 8 12 15 4 11 10 4 6 7 XT34 14 7 5 Note) Cannot be used for movable wiring.

MXQ

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) Basic style 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 11 5.5 11 Adjuster at extension end N-M5 x 0.8 thread depth 6 36.5 (Adjuster at extension end) 11 5.5 5H9 depth 5 +0.030 0 Retraction end adjuster 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

MRHQ

Rotary port B Rotary port A 12-11-5 6 Series MRHQ Model Selection Procedure Calculation Example Operating conditions 1 h O G Enumerate the operating conditions according to the mounting position and workpiece configuration. Please refer to page 12-11-12 for drawing dimensions.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56