Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 0.05 0.05 0.06 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to pitch moment load Displacement at "A" when load is applied at "F" Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

1

CP95 Front mounting flange Hs B A A B B B A Hs Hs Hs Hs Hs A NCM 20 22.5 7 5 12 6.5 4 11 23.5 29.5 26 29 25 8 7.5 25 B 25.5 7 5 12 6.5 4 11 26.5 32.5 29 32 28 8 7.5 CDM2 NCA 32 29 8 6 13 7.5 5 12 30 36 32.5 35.5 31.5 9 8.5 HS 40 C D 33 13 11 18 12.5 10 17 34 40 36.5 39.5 35.5 14 13.5 D20 25.5 30.5 [9.5] 21.5 (29.5) 18.5 (26.5) 25.5 (33.5) 28 [7] 35 [14] 21 (29) View C-C 26.5 32.5 29 32 28

CATALOG

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

A

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Adjuster for series 11-MXP6 is available for one side only. Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

smcmaintenancepartslist

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

SMC

1 N-M4 x 0.7 thread depth 5.5 (Insert) 9 5 31.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 18.5 8.5 5 K 18.5 8.5 4.75 Vacuum suction port M5 x 0.8 5 NA-M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2-M5 x 0.8 4H9 depth 3.5 +0.030 0 2-M4 x 0.7 thread

The 11/22-MXPJ6 miniature high precision slide table provides travelling parallelism of 0.004 mm and non-rotating accuracy of +/-0.03° in a compact package, height: 17 mm and width: 20mm.

01-mxp-e

3 Gasket (for plug) PVC MXPJ6-PS MXPJ6-PS 6 O-ring NBR Piston seal Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 122 Air Slide Table Series MXP 8, 10, 12, 16 Replacement Procedure is P.326 Construction Actuators Modular F.R.L.

Bore size: 6 mm ; Stroke lengths: 5 and 10 mm ; Non-rotating accuracy +/-0.03° ; Travelling parallelism 0.004 mm ; Rubber bumper ; RoHS compliant

Bore size: 6 mm ; Stroke lengths: 5 and 10 mm ; Non-rotating accuracy +/-0.03° ; Travelling parallelism 0.004 mm ; Rubber bumper ; RoHS compliant

Bore size: 6 mm ; Stroke lengths: 5 and 10 mm ; Non-rotating accuracy +/-0.03° ; Travelling parallelism 0.004 mm ; Rubber bumper ; RoHS compliant

Bore Size: Ø6, Stroke: 5mm

Bore Size: Ø6, Stroke: 5mm

The MXPJ6 is ideal for clean room applications and those that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees.

The MXPJ6 is ideal for clean room applications and those that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees.

Specification: Copper, Flourine & Silicon-Free + Low Particle Generation, Stroke: 5mm

Specification: 22 (Copper, Flourine & Silicon-Free + Low Particle Generation), Stroke: 5mm