Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ1210 13-/22-MXQ1220 13-/22-MXQ1230 13-/22-MXQ1240 13-/22-MXQ1250 13-/22-MXQ1275 13-/22-MXQ12-100 Note) Note) 1322Note) Refer to the bottom

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ12-10Z 28 17 17 11 32 32 46 11 32 82.5 4 2 62.5 75 MXQ12-20Z 28 19 19 11 32 32 48 13 32 92.5 4 2 64.5 77 MXQ12-30Z 38 21 21 11 40 40 58 15 40 102.5 4 2 74.5 87 MXQ12-40Z 34 40 27 39 60 23 50 120.5 6 3 92.5 105 MXQ12-50Z 34 11 50 37 39 39 60 23 60 130.5 6 3 102.5 115 MXQ12-75Z 36 25 61 41 36 72 100 42 85 174.5 8 4 146.5 159 MXQ12

Air Slide Table Series MXQ

-30 MXQ12-20 MXQ12-10 MXQ12-100 0.10 0.020 MXQ12-100 0.04 MXQ12-30 MXQ12-50 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 Table displacement mm Table displacement mm Table displacement mm 0.08 0.016 MXQ12-50 MXQ12-75 MXQ12-30 MXQ12-40 0.03 MXQ12-75 MXQ12-40 0.06 0.012 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 160 40 80 120 0 20 40 60 80 100 20 40 60 80 100 Load N (1N

smcmaintenancepartslist

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82 Compact Cylinder with Air Cushion Series RQ Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction 20 to 40 50 to 100 Actuators Modular F.R.L.

Slide Tables MX Series

Bolt used Max. tightening torqueN.m{kgf.cm} l mm Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10.5 12.5 16 21 26 32 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 3. Top body tapped A hand can be caught by an adjuster option.

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

100 150 Misc.

MHZ

20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 100 Overhang H (mm) 80 Pressure 0.2 MPa Pressure 0.2 MPa 60 0.3 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 40 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 12-2-13 13 Series MHZ Model Selection Confirmation of Gripping Point: Series MHZ/Internal Grip Step 2 Internal Grip Internal Grip

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided

CATALOG

121 40 6 14 M14x1.5 44 18 87 12 M10x1.25 50 139 50 7 18 M18x1.5 55 14 102 13 M12x1.25 58 162 63 7 18 M18x1.5 69 14 102 13 M14x1.5 58 162 80 11 22 M22x1.5 80 38 122 71 196 100 11 26 M26x1.5 100 12 122 71 196 **Trunnion mounting threads in flats NA are not available for 80, 100 bores.

A

121 40 6 14 M14x1.5 44 18 87 12 M10x1.25 50 139 50 7 18 M18x1.5 55 14 102 13 M12x1.25 58 162 63 7 18 M18x1.5 69 14 102 13 M14x1.5 58 162 80 11 22 M22x1.5 80 38 122 71 196 100 11 26 M26x1.5 100 12 122 71 196 **Trunnion mounting threads in flats NA are not available for 80, 100 bores.

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.